TY - JOUR
T1 - Numerical investigation of the influence of cooling flux on the generation of dislocations in cylindrical mono-like silicon growth
AU - Gao, B.
AU - Kakimoto, K.
N1 - Funding Information:
This work was partly supported by the New Energy and Industrial Technology Development Organization (NEDO) under the Ministry of Economy, Trade and Industry (METI), Japan.
PY - 2013
Y1 - 2013
N2 - To effectively reduce dislocations during seeded growth of cylindrical monocrystalline-like silicon by controlling the cooling flux, the relationship between the generation of dislocations and cooling flux has been numerically studied. The results show that the generation of dislocations is determined by the cooling flux difference, not by the cooling flux inside the crystal. Good control of the input and output cooling fluxes during practical crystal growth is essential to reduce the generation of dislocations. Further analysis shows that the cooling flux difference in the radial or axial direction is linearly related to the square root of the maximum dislocation density. In other words, a linear decrease of the cooling flux difference in the radial or axial direction results in a quadratic decrease of the maximum dislocation density. Therefore, the most effective method to reduce dislocations during the cooling process is to decrease the cooling flux difference between the input and output fluxes, i.e., to decrease the energy accumulation or dissipation rate inside the whole crystal.
AB - To effectively reduce dislocations during seeded growth of cylindrical monocrystalline-like silicon by controlling the cooling flux, the relationship between the generation of dislocations and cooling flux has been numerically studied. The results show that the generation of dislocations is determined by the cooling flux difference, not by the cooling flux inside the crystal. Good control of the input and output cooling fluxes during practical crystal growth is essential to reduce the generation of dislocations. Further analysis shows that the cooling flux difference in the radial or axial direction is linearly related to the square root of the maximum dislocation density. In other words, a linear decrease of the cooling flux difference in the radial or axial direction results in a quadratic decrease of the maximum dislocation density. Therefore, the most effective method to reduce dislocations during the cooling process is to decrease the cooling flux difference between the input and output fluxes, i.e., to decrease the energy accumulation or dissipation rate inside the whole crystal.
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U2 - 10.1016/j.jcrysgro.2013.09.002
DO - 10.1016/j.jcrysgro.2013.09.002
M3 - Article
AN - SCOPUS:84884838129
VL - 384
SP - 13
EP - 20
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
SN - 0022-0248
ER -