Numerical investigation of the production mechanism of a low-temperature electron cyclotron resonance plasma

Physics

• Electron Cyclotron Resonance 100%
• Electron Energy 100%
• Gases 50%
• Magnetic Field Configurations 50%
• Mirrors 50%
• Mixtures 50%
• Model 50%
• Molecules 50%
• Nitriding 50%
• Nitrogen 100%
• Temperature 50%
• Utilization 50%

Chemistry

• Application 50%
• Argon 50%
• Electron Cyclotron Resonance 100%
• Electron Impact 50%
• Electron Temperature 100%
• Gas 50%
• Mixture 50%
• Molecule 50%
• Nitrogen 100%
• Reaction Temperature 50%
• Reactive Sputtering 50%
• Vibrational Excitation 50%