Numerical simulation of thermal transpiration of capacitance diaphragm gauge

Shin Ichi Nishizawa, Masahiro Hirata

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The Capacitance diaphragm gauge (CDG) is one of the most important vacuum gauges in low and middle vacuum ranges. The difference of temperature between the sensor head and the vacuum chamber gives a non-linear sensitivity of the gauge depending on the pressure due to thermal transpiration effect. Change in the sensitivity of about 4% between molecular flow regime and viscous flow regime is significant for metrological use of the gauge. In this study, by using a DSMC method, pressure distribution in the connecting tube of the gauge was obtained under the pressure range from molecular flow regime to viscous flow regime with taking account of temperature distribution along the connecting tube. It was in good agreement with the pressure dependence of sensitivity obtained by static expansion system experimentally. Furthermore, influence of gas-surface interaction on the thermal transpiration was also discussed.

Original languageEnglish
Pages (from-to)119-122
Number of pages4
JournalShinku/Journal of the Vacuum Society of Japan
Volume45
Issue number3
DOIs
Publication statusPublished - Jan 1 2002
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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