Numerical study of the effects of cusp-shaped magnetic fields and thermal conductivity on the melt-crystal interface in CZ crystal growth

Koichi Kakimoto, Lijun Liu

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

A numerical study was carried out to determine the effects of magnetic fields and thermal conductivity of a crystal on the melt flow in a crystal growth system. Comparisons of computations for the case of no magnetic field and for two types of cusp-shaped magnetic fields were made. The effect of thermal conductivity of a crystal on the shape of a melt-crystal interface was also investigated. The computation results showed that the magnetic fields have clear effects on both the pattern and strength of flow of the melt and the interface shape. Application of a magnetic field to the Czochralski system is therefore an effective tool for controlling the quality of bulk crystal during Czochralski growth process. The results also showed that the shape of the interface could be modified by changing thermal conductivity of silicon.

Original languageEnglish
Pages (from-to)716-725
Number of pages10
JournalCrystal Research and Technology
Volume38
Issue number7-8
Publication statusPublished - Aug 28 2003

Fingerprint

Crystallization
cusps
Crystal growth
crystal growth
Thermal conductivity
thermal conductivity
Magnetic fields
conductivity
Crystals
magnetic fields
crystals
Crystal growth from melt
Silicon
silicon

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

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AB - A numerical study was carried out to determine the effects of magnetic fields and thermal conductivity of a crystal on the melt flow in a crystal growth system. Comparisons of computations for the case of no magnetic field and for two types of cusp-shaped magnetic fields were made. The effect of thermal conductivity of a crystal on the shape of a melt-crystal interface was also investigated. The computation results showed that the magnetic fields have clear effects on both the pattern and strength of flow of the melt and the interface shape. Application of a magnetic field to the Czochralski system is therefore an effective tool for controlling the quality of bulk crystal during Czochralski growth process. The results also showed that the shape of the interface could be modified by changing thermal conductivity of silicon.

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