Numerical study of the relationship between growth condition and atomic arrangement of InGaN

Y. Kangawa, K. Kakimoto, T. Ito, A. Koukltu

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Monte Carlo simulations of InGaN MOVPE were carried out to investigate the relationship between growth conditions and atomic arrangement in thin films grown on (0001) and (112̄0). In the case of small input partial pressures of indium, it was found that compositional instability was enhanced during the site exchanging process instead of the adsorption process. Moreover, it was found that compositional fluctuation in thin films grown on (112̄0) is smaller than that in thin films grown on (0001). This suggests that accumulated stress near the growth surface influences the compositional fluctuation.

Original languageEnglish
Pages (from-to)1784-1788
Number of pages5
JournalPhysica Status Solidi (B) Basic Research
Issue number6
Publication statusPublished - Jun 1 2007


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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