Abstract
A capacitively coupled VHF H2 plasma (60 MHz) was produced by a narrow gap discharge at high pressures, and spatial distributions of the plasma parameters were examined with the Langmuir probe. A bi-Maxwellian electron distribution was observed near the discharge electrode while a Maxwellian one near the center of the inter-electrode gap. The simulation using the PIC code showed that electrons had the Druyvesteyn-like distribution near the discharge electrode.
Original language | English |
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Pages (from-to) | 584-587 |
Number of pages | 4 |
Journal | Plasma Processes and Polymers |
Volume | 13 |
Issue number | 6 |
DOIs | |
Publication status | Published - Jun 1 2016 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Polymers and Plastics