Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge

Kuan Chen Chen; Kuo Feng Chiu; Chia Fu Chen; Cheng Yang Lien; Yu Jer Tsai; Ting Kuei Lien; Fumihiko Matsunaga; Masaaki Tanaka; Kohei Ogiwara; Kiichiro Uchino; Yoshinobu Kawai

doi:10.1002/ppap.201500183

Observation of Bi-Maxwellian Distributions in a H₂ Plasma Produced by a Narrow Gap VHF Discharge

Kuan Chen Chen, Kuo Feng Chiu, Chia Fu Chen, Cheng Yang Lien, Yu Jer Tsai, Ting Kuei Lien, Fumihiko Matsunaga, Masaaki Tanaka, Kohei Ogiwara, Kiichiro Uchino, Yoshinobu Kawai

Electrical Engineering Sciences

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

A capacitively coupled VHF H₂ plasma (60 MHz) was produced by a narrow gap discharge at high pressures, and spatial distributions of the plasma parameters were examined with the Langmuir probe. A bi-Maxwellian electron distribution was observed near the discharge electrode while a Maxwellian one near the center of the inter-electrode gap. The simulation using the PIC code showed that electrons had the Druyvesteyn-like distribution near the discharge electrode.

Original language	English
Pages (from-to)	584-587
Number of pages	4
Journal	Plasma Processes and Polymers
Volume	13
Issue number	6
DOIs	https://doi.org/10.1002/ppap.201500183
Publication status	Published - Jun 1 2016

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Polymers and Plastics

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10.1002/ppap.201500183

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title = "Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge",

abstract = "A capacitively coupled VHF H2 plasma (60 MHz) was produced by a narrow gap discharge at high pressures, and spatial distributions of the plasma parameters were examined with the Langmuir probe. A bi-Maxwellian electron distribution was observed near the discharge electrode while a Maxwellian one near the center of the inter-electrode gap. The simulation using the PIC code showed that electrons had the Druyvesteyn-like distribution near the discharge electrode.",

author = "Chen, {Kuan Chen} and Chiu, {Kuo Feng} and Chen, {Chia Fu} and Lien, {Cheng Yang} and Tsai, {Yu Jer} and Lien, {Ting Kuei} and Fumihiko Matsunaga and Masaaki Tanaka and Kohei Ogiwara and Kiichiro Uchino and Yoshinobu Kawai",

note = "Funding Information: This research was supported by the National Science Council, Taiwan (NSC102-2221-E-035-012) Publisher Copyright: {\textcopyright} 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim",

year = "2016",

month = jun,

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doi = "10.1002/ppap.201500183",

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AU - Chen, Kuan Chen

AU - Chiu, Kuo Feng

AU - Chen, Chia Fu

AU - Lien, Cheng Yang

AU - Tsai, Yu Jer

AU - Lien, Ting Kuei

AU - Matsunaga, Fumihiko

AU - Tanaka, Masaaki

AU - Ogiwara, Kohei

AU - Uchino, Kiichiro

AU - Kawai, Yoshinobu

PY - 2016/6/1

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N2 - A capacitively coupled VHF H2 plasma (60 MHz) was produced by a narrow gap discharge at high pressures, and spatial distributions of the plasma parameters were examined with the Langmuir probe. A bi-Maxwellian electron distribution was observed near the discharge electrode while a Maxwellian one near the center of the inter-electrode gap. The simulation using the PIC code showed that electrons had the Druyvesteyn-like distribution near the discharge electrode.

AB - A capacitively coupled VHF H2 plasma (60 MHz) was produced by a narrow gap discharge at high pressures, and spatial distributions of the plasma parameters were examined with the Langmuir probe. A bi-Maxwellian electron distribution was observed near the discharge electrode while a Maxwellian one near the center of the inter-electrode gap. The simulation using the PIC code showed that electrons had the Druyvesteyn-like distribution near the discharge electrode.

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Observation of Bi-Maxwellian Distributions in a H₂ Plasma Produced by a Narrow Gap VHF Discharge

Abstract

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