Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge

Kuan Chen Chen, Kuo Feng Chiu, Chia Fu Chen, Cheng Yang Lien, Yu Jer Tsai, Ting Kuei Lien, Fumihiko Matsunaga, Masaaki Tanaka, Kohei Ogiwara, Kiichiro Uchino, Yoshinobu Kawai

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


A capacitively coupled VHF H2 plasma (60 MHz) was produced by a narrow gap discharge at high pressures, and spatial distributions of the plasma parameters were examined with the Langmuir probe. A bi-Maxwellian electron distribution was observed near the discharge electrode while a Maxwellian one near the center of the inter-electrode gap. The simulation using the PIC code showed that electrons had the Druyvesteyn-like distribution near the discharge electrode.

Original languageEnglish
Pages (from-to)584-587
Number of pages4
JournalPlasma Processes and Polymers
Issue number6
Publication statusPublished - Jun 1 2016

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Polymers and Plastics


Dive into the research topics of 'Observation of Bi-Maxwellian Distributions in a H<sub>2</sub> Plasma Produced by a Narrow Gap VHF Discharge'. Together they form a unique fingerprint.

Cite this