Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge

Kuan Chen Chen, Kuo Feng Chiu, Chia Fu Chen, Cheng Yang Lien, Yu Jer Tsai, Ting Kuei Lien, Fumihiko Matsunaga, Masaaki Tanaka, Kohei Ogiwara, Kiichiro Uchino, Yoshinobu Kawai

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Abstract

A capacitively coupled VHF H2 plasma (60 MHz) was produced by a narrow gap discharge at high pressures, and spatial distributions of the plasma parameters were examined with the Langmuir probe. A bi-Maxwellian electron distribution was observed near the discharge electrode while a Maxwellian one near the center of the inter-electrode gap. The simulation using the PIC code showed that electrons had the Druyvesteyn-like distribution near the discharge electrode.

Original languageEnglish
Pages (from-to)584-587
Number of pages4
JournalPlasma Processes and Polymers
Volume13
Issue number6
DOIs
Publication statusPublished - Jun 1 2016

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Polymers and Plastics

Cite this

Chen, K. C., Chiu, K. F., Chen, C. F., Lien, C. Y., Tsai, Y. J., Lien, T. K., ... Kawai, Y. (2016). Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge. Plasma Processes and Polymers, 13(6), 584-587. https://doi.org/10.1002/ppap.201500183