Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge

Kuan Chen Chen; Kuo Feng Chiu; Chia Fu Chen; Cheng Yang Lien; Yu Jer Tsai; Ting Kuei Lien; Fumihiko Matsunaga; Masaaki Tanaka; Kohei Ogiwara; Kiichiro Uchino; Yoshinobu Kawai

doi:10.1002/ppap.201500183

Observation of Bi-Maxwellian Distributions in a H₂ Plasma Produced by a Narrow Gap VHF Discharge

Kuan Chen Chen, Kuo Feng Chiu, Chia Fu Chen, Cheng Yang Lien, Yu Jer Tsai, Ting Kuei Lien, Fumihiko Matsunaga, Masaaki Tanaka, Kohei Ogiwara, Kiichiro Uchino, Yoshinobu Kawai

Electrical Engineering Sciences

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1 Citation (Scopus)

Abstract

A capacitively coupled VHF H₂ plasma (60 MHz) was produced by a narrow gap discharge at high pressures, and spatial distributions of the plasma parameters were examined with the Langmuir probe. A bi-Maxwellian electron distribution was observed near the discharge electrode while a Maxwellian one near the center of the inter-electrode gap. The simulation using the PIC code showed that electrons had the Druyvesteyn-like distribution near the discharge electrode.

Original language	English
Pages (from-to)	584-587
Number of pages	4
Journal	Plasma Processes and Polymers
Volume	13
Issue number	6
DOIs	https://doi.org/10.1002/ppap.201500183
Publication status	Published - Jun 1 2016

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All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Polymers and Plastics

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Chen, K. C., Chiu, K. F., Chen, C. F., Lien, C. Y., Tsai, Y. J., Lien, T. K., ... Kawai, Y. (2016). Observation of Bi-Maxwellian Distributions in a H₂ Plasma Produced by a Narrow Gap VHF Discharge. Plasma Processes and Polymers, 13(6), 584-587. https://doi.org/10.1002/ppap.201500183

Observation of Bi-Maxwellian Distributions in a H₂ Plasma Produced by a Narrow Gap VHF Discharge. / Chen, Kuan Chen; Chiu, Kuo Feng; Chen, Chia Fu; Lien, Cheng Yang; Tsai, Yu Jer; Lien, Ting Kuei; Matsunaga, Fumihiko; Tanaka, Masaaki; Ogiwara, Kohei; Uchino, Kiichiro; Kawai, Yoshinobu.

In: Plasma Processes and Polymers, Vol. 13, No. 6, 01.06.2016, p. 584-587.

Research output: Contribution to journal › Article

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10.1002/ppap.201500183