Observation of graphene growing process on SiC(0001) surface formed by KrF excimer-laser irradiation

Masakazu Hattori, Hiroshi Ikenoue, Daisuke Nakamura, Tatsuo Okada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Observation of graphene growing process on SiC(0001) step and terrace structure formed by direct laser patterning is proposed. We have proposed a novel method of direct growth of patterned graphene on SiC(0001) surfaces using KrF excimer-laser irradiation. KrF excimer-laser with a wavelength of 248 nm and a duration of 55 ns was used to graphene forming in this study. Laser irradiation was achieved with various laser fluenece. Grain size and number of layers of the graphene was varied by laser irradiation condition. Through conductive atomic force microscopy, it was observed that graphene grain expanded from (112-n) faced step area to (0001) faced terrace area in initial graphene growth process. From the result of the Raman spectroscopy, transmission electron microscopy and Conductive AFM, we summarized graphene growth process on SiC(0001) surfaces.

Original languageEnglish
Title of host publicationLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI
EditorsBeat Neuenschwander, Stephan Roth, Costas P. Grigoropoulos, Tetsuya Makimura
PublisherSPIE
ISBN (Electronic)9781628419702
DOIs
Publication statusPublished - Jan 1 2016
EventLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI - San Francisco, United States
Duration: Feb 15 2016Feb 18 2016

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9735
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI
CountryUnited States
CitySan Francisco
Period2/15/162/18/16

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Hattori, M., Ikenoue, H., Nakamura, D., & Okada, T. (2016). Observation of graphene growing process on SiC(0001) surface formed by KrF excimer-laser irradiation. In B. Neuenschwander, S. Roth, C. P. Grigoropoulos, & T. Makimura (Eds.), Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI [97350Y] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9735). SPIE. https://doi.org/10.1117/12.2211865