Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering

M. A.Mansour Elsabbagh, M. D. Bowden, Kiichiro Uchino, K. Muraoka

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Electron energy distribution functions in low-pressure capacitively coupled radio-frequency argon discharges were measured using the technique of laser Thomson scattering. It was found that the distribution functions changed from a bi-Maxwellian at lower pressures to a single Maxwellian at higher pressures. These measurements provide independent confirmation of probe measurements made in similar discharges. The electron temperature and density of the cold group of electrons were measured with an accuracy of better than 10%.

Original languageEnglish
Pages (from-to)3187-3189
Number of pages3
JournalApplied Physics Letters
Volume78
Issue number21
DOIs
Publication statusPublished - May 21 2001

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Fingerprint Dive into the research topics of 'Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering'. Together they form a unique fingerprint.

  • Cite this