Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering

M. A.Mansour Elsabbagh, M. D. Bowden, Kiichiro Uchino, K. Muraoka

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Electron energy distribution functions in low-pressure capacitively coupled radio-frequency argon discharges were measured using the technique of laser Thomson scattering. It was found that the distribution functions changed from a bi-Maxwellian at lower pressures to a single Maxwellian at higher pressures. These measurements provide independent confirmation of probe measurements made in similar discharges. The electron temperature and density of the cold group of electrons were measured with an accuracy of better than 10%.

Original languageEnglish
Pages (from-to)3187-3189
Number of pages3
JournalApplied Physics Letters
Volume78
Issue number21
DOIs
Publication statusPublished - May 21 2001

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Thomson scattering
radio frequencies
energy distribution
low pressure
distribution functions
electron energy
lasers
argon
probes
electrons

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering. / Elsabbagh, M. A.Mansour; Bowden, M. D.; Uchino, Kiichiro; Muraoka, K.

In: Applied Physics Letters, Vol. 78, No. 21, 21.05.2001, p. 3187-3189.

Research output: Contribution to journalArticle

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