On-Chip Cavitation Generation Based on Ultra-High-Speed Flow Control

Yusuke Kasai; Shinya Sakuma; Fumihito Arai

doi:10.1109/TRANSDUCERS.2019.8808671

On-Chip Cavitation Generation Based on Ultra-High-Speed Flow Control

Yusuke Kasai, Shinya Sakuma, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present an on-chip cavitation generation system based on ultra-high-speed flow control. Novelties are that: (1) cavitation is observable in a high-rigidity microfluidic chip consisting of glass-Si-glass layered substrates, and (2) cavitation can be generated only based on flow control. As results, constructing on-chip membrane pumps for ultrahigh-speed flow, we succeeded in the on-chip cavitation generation by ultra-high-speed flow control and observing its phenomenon on a microscope. In addition, we found that the result corresponded to the Finite Element Method (FEM) analysis which showed that the cavitation occurred at the area where the dynamic pressure was lower than the saturated vaper pressure of water.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	801-804
Number of pages	4
ISBN (Electronic)	9781728120072
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808671
Publication status	Published - Jun 2019
Externally published	Yes
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: Jun 23 2019 → Jun 27 2019

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country	Germany
City	Berlin
Period	6/23/19 → 6/27/19

All Science Journal Classification (ASJC) codes

Process Chemistry and Technology
Spectroscopy
Electrical and Electronic Engineering
Mechanical Engineering
Electronic, Optical and Magnetic Materials
Control and Optimization
Instrumentation

Access to Document

10.1109/TRANSDUCERS.2019.8808671

Fingerprint Dive into the research topics of 'On-Chip Cavitation Generation Based on Ultra-High-Speed Flow Control'. Together they form a unique fingerprint.

Cite this

Kasai, Y., Sakuma, S., & Arai, F. (2019). On-Chip Cavitation Generation Based on Ultra-High-Speed Flow Control. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 801-804). [8808671] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808671

On-Chip Cavitation Generation Based on Ultra-High-Speed Flow Control. / Kasai, Yusuke; Sakuma, Shinya; Arai, Fumihito.

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 801-804 8808671 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kasai, Y, Sakuma, S & Arai, F 2019, On-Chip Cavitation Generation Based on Ultra-High-Speed Flow Control. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808671, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., pp. 801-804, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 6/23/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808671

Kasai Y, Sakuma S, Arai F. On-Chip Cavitation Generation Based on Ultra-High-Speed Flow Control. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. p. 801-804. 8808671. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). https://doi.org/10.1109/TRANSDUCERS.2019.8808671

Kasai, Yusuke ; Sakuma, Shinya ; Arai, Fumihito. / On-Chip Cavitation Generation Based on Ultra-High-Speed Flow Control. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 801-804 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

@inproceedings{fd8a0fa49bfd40dba8fdcf0f997e9542,

title = "On-Chip Cavitation Generation Based on Ultra-High-Speed Flow Control",

abstract = "We present an on-chip cavitation generation system based on ultra-high-speed flow control. Novelties are that: (1) cavitation is observable in a high-rigidity microfluidic chip consisting of glass-Si-glass layered substrates, and (2) cavitation can be generated only based on flow control. As results, constructing on-chip membrane pumps for ultrahigh-speed flow, we succeeded in the on-chip cavitation generation by ultra-high-speed flow control and observing its phenomenon on a microscope. In addition, we found that the result corresponded to the Finite Element Method (FEM) analysis which showed that the cavitation occurred at the area where the dynamic pressure was lower than the saturated vaper pressure of water.",

author = "Yusuke Kasai and Shinya Sakuma and Fumihito Arai",

note = "Funding Information: This work was supported by Grant-in-Aid for JSPS Research Fellow (18J15242).; 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

year = "2019",

month = jun,

doi = "10.1109/TRANSDUCERS.2019.8808671",

language = "English",

series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "801--804",

booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

address = "United States",

}

TY - GEN

T1 - On-Chip Cavitation Generation Based on Ultra-High-Speed Flow Control

AU - Kasai, Yusuke

AU - Sakuma, Shinya

AU - Arai, Fumihito

N1 - Funding Information: This work was supported by Grant-in-Aid for JSPS Research Fellow (18J15242).

PY - 2019/6

Y1 - 2019/6

N2 - We present an on-chip cavitation generation system based on ultra-high-speed flow control. Novelties are that: (1) cavitation is observable in a high-rigidity microfluidic chip consisting of glass-Si-glass layered substrates, and (2) cavitation can be generated only based on flow control. As results, constructing on-chip membrane pumps for ultrahigh-speed flow, we succeeded in the on-chip cavitation generation by ultra-high-speed flow control and observing its phenomenon on a microscope. In addition, we found that the result corresponded to the Finite Element Method (FEM) analysis which showed that the cavitation occurred at the area where the dynamic pressure was lower than the saturated vaper pressure of water.

AB - We present an on-chip cavitation generation system based on ultra-high-speed flow control. Novelties are that: (1) cavitation is observable in a high-rigidity microfluidic chip consisting of glass-Si-glass layered substrates, and (2) cavitation can be generated only based on flow control. As results, constructing on-chip membrane pumps for ultrahigh-speed flow, we succeeded in the on-chip cavitation generation by ultra-high-speed flow control and observing its phenomenon on a microscope. In addition, we found that the result corresponded to the Finite Element Method (FEM) analysis which showed that the cavitation occurred at the area where the dynamic pressure was lower than the saturated vaper pressure of water.

UR - http://www.scopus.com/inward/record.url?scp=85071929031&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85071929031&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2019.8808671

DO - 10.1109/TRANSDUCERS.2019.8808671

M3 - Conference contribution

AN - SCOPUS:85071929031

T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

SP - 801

EP - 804

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Y2 - 23 June 2019 through 27 June 2019

ER -