On-Chip Cavitation Generation Based on Ultra-High-Speed Flow Control

Yusuke Kasai, Shinya Sakuma, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present an on-chip cavitation generation system based on ultra-high-speed flow control. Novelties are that: (1) cavitation is observable in a high-rigidity microfluidic chip consisting of glass-Si-glass layered substrates, and (2) cavitation can be generated only based on flow control. As results, constructing on-chip membrane pumps for ultrahigh-speed flow, we succeeded in the on-chip cavitation generation by ultra-high-speed flow control and observing its phenomenon on a microscope. In addition, we found that the result corresponded to the Finite Element Method (FEM) analysis which showed that the cavitation occurred at the area where the dynamic pressure was lower than the saturated vaper pressure of water.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages801-804
Number of pages4
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - Jun 2019
Externally publishedYes
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: Jun 23 2019Jun 27 2019

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
CountryGermany
CityBerlin
Period6/23/196/27/19

All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

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