On-chip magnetic 3D soft microactuators made by gray-scale lithography

Yoko Yamanishi, Shinya Sakuma, Yuki Kihara, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper we describe a novel fabrication method of three dimensional polymeric magnetically driven microtools (MMT) for non-intrusive and no contamination experiments on a chip. In order to obtain precise and complicated three dimensional patterns of magnetically driven 3D microtools, a grayscale photolithography technique has been applied by making good use of thick nega-photoresist as sacrificed mold. By controlling an amount of ultraviolet light with a gradation of gray tone mask, we have fabricated smoothly curved (100 μm gap) object without steps which tend to be appeared in case of conventional layer by layer photolithography techniques. A wide range of on-chip application of microactuators can be proposed by using a softness of polymer-based 3D MMT. For example, microrotor was operated as miromixer and micropump, also microloader was actuated by the magnetic and fluidic force. The surface of the 3D MMT was fabricated with a group of spiked pattern to reduce the contact area between PDMS (Poly dimethyl siloxane) microchannel and PDMS-based 3D MMT. The produced 3D MMT can be applied to complicated on-chip manipulations of sensitive materials such as cells.

Original languageEnglish
Title of host publication2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS
Pages4054-4059
Number of pages6
DOIs
Publication statusPublished - 2008
Externally publishedYes
Event2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS - Nice, France
Duration: Sep 22 2008Sep 26 2008

Other

Other2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS
CountryFrance
CityNice
Period9/22/089/26/08

Fingerprint

Microactuators
Photolithography
Lithography
Fluidics
Photoresists
Microchannels
Masks
Contamination
Fabrication
Polymers
Experiments
Ultraviolet Rays

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Computer Vision and Pattern Recognition
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Yamanishi, Y., Sakuma, S., Kihara, Y., & Arai, F. (2008). On-chip magnetic 3D soft microactuators made by gray-scale lithography. In 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS (pp. 4054-4059). [4651229] https://doi.org/10.1109/IROS.2008.4651229

On-chip magnetic 3D soft microactuators made by gray-scale lithography. / Yamanishi, Yoko; Sakuma, Shinya; Kihara, Yuki; Arai, Fumihito.

2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS. 2008. p. 4054-4059 4651229.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yamanishi, Y, Sakuma, S, Kihara, Y & Arai, F 2008, On-chip magnetic 3D soft microactuators made by gray-scale lithography. in 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS., 4651229, pp. 4054-4059, 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS, Nice, France, 9/22/08. https://doi.org/10.1109/IROS.2008.4651229
Yamanishi Y, Sakuma S, Kihara Y, Arai F. On-chip magnetic 3D soft microactuators made by gray-scale lithography. In 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS. 2008. p. 4054-4059. 4651229 https://doi.org/10.1109/IROS.2008.4651229
Yamanishi, Yoko ; Sakuma, Shinya ; Kihara, Yuki ; Arai, Fumihito. / On-chip magnetic 3D soft microactuators made by gray-scale lithography. 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS. 2008. pp. 4054-4059
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