On the atomic arrangement on the ZrO/W(100) cathode surface: Models for low-energy electron diffraction

Hideaki Nakane, Satoru Kawata, Masayoshi Oka, Taichi Takami, Seigi Mizuno, Hiroshi Adachi

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)620
JournalJournal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Volume17
Publication statusPublished - 1999

Cite this

On the atomic arrangement on the ZrO/W(100) cathode surface: Models for low-energy electron diffraction. / Nakane, Hideaki; Kawata, Satoru; Oka, Masayoshi; Takami, Taichi; Mizuno, Seigi; Adachi, Hiroshi.

In: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, Vol. 17, 1999, p. 620.

Research output: Contribution to journalArticle

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journal = "Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena",
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AU - Nakane, Hideaki

AU - Kawata, Satoru

AU - Oka, Masayoshi

AU - Takami, Taichi

AU - Mizuno, Seigi

AU - Adachi, Hiroshi

PY - 1999

Y1 - 1999

M3 - Article

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SP - 620

JO - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

JF - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

SN - 0734-211X

ER -