One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges

Iori Nagao; Kunihiro Kamataki; Akihiro Yamamoto; Michihiro Otaka; Yuma Yamamoto; Daisuke Yamashita; Naoto Yamashita; Takamasa Okumura; Naho Itagaki; Kazunori Koga; Masaharu Shiratani

doi:10.1557/s43580-022-00417-w

One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges

Iori Nagao, Kunihiro Kamataki, Akihiro Yamamoto, Michihiro Otaka, Yuma Yamamoto, Daisuke Yamashita, Naoto Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

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Abstract

We have investigated the effects of amplitude modulation (AM) discharges especially in differences of AM frequency on plasma parameters such as electric field, electron density, electron temperature, ion energy distribution function (IEDF), and ion angular distribution function (IADF) of capacitively coupled AM discharge Ar plasma using a Particle-in-cell/Monte Carlo collision (PIC-MCC) model. The electron density and the kinetic energy of ions incident on the grounded electrode oscillate periodically with the AM frequency. The oscillation amplitude of the electron density in the central plasma region between the electrodes decreases with increasing the AM frequency above 5 kHz. On the other hand, the peak energy of IEDF decreases with increasing the AM frequency above 500 kHz. Thus, the AM frequency is a good tuning knob to control such plasma parameters.

Original language	English
Pages (from-to)	911-917
Number of pages	7
Journal	MRS Advances
Volume	7
Issue number	31
DOIs	https://doi.org/10.1557/s43580-022-00417-w
Publication status	Published - Nov 2022

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1557/s43580-022-00417-w

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Nagao, I., Kamataki, K., Yamamoto, A., Otaka, M., Yamamoto, Y., Yamashita, D., Yamashita, N., Okumura, T., Itagaki, N., Koga, K., & Shiratani, M. (2022). One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges. MRS Advances, 7(31), 911-917. https://doi.org/10.1557/s43580-022-00417-w

Nagao, I, Kamataki, K, Yamamoto, A, Otaka, M, Yamamoto, Y, Yamashita, D, Yamashita, N , Okumura, T , Itagaki, N , Koga, K & Shiratani, M 2022, 'One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges', MRS Advances, vol. 7, no. 31, pp. 911-917. https://doi.org/10.1557/s43580-022-00417-w

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title = "One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges",

abstract = "We have investigated the effects of amplitude modulation (AM) discharges especially in differences of AM frequency on plasma parameters such as electric field, electron density, electron temperature, ion energy distribution function (IEDF), and ion angular distribution function (IADF) of capacitively coupled AM discharge Ar plasma using a Particle-in-cell/Monte Carlo collision (PIC-MCC) model. The electron density and the kinetic energy of ions incident on the grounded electrode oscillate periodically with the AM frequency. The oscillation amplitude of the electron density in the central plasma region between the electrodes decreases with increasing the AM frequency above 5 kHz. On the other hand, the peak energy of IEDF decreases with increasing the AM frequency above 500 kHz. Thus, the AM frequency is a good tuning knob to control such plasma parameters.",

author = "Iori Nagao and Kunihiro Kamataki and Akihiro Yamamoto and Michihiro Otaka and Yuma Yamamoto and Daisuke Yamashita and Naoto Yamashita and Takamasa Okumura and Naho Itagaki and Kazunori Koga and Masaharu Shiratani",

note = "Funding Information: This study was partly supported by JSPS KAKENHI Grant Number JP20H00142. Publisher Copyright: {\textcopyright} 2022, The Author(s), under exclusive licence to The Materials Research Society.",

year = "2022",

month = nov,

doi = "10.1557/s43580-022-00417-w",

language = "English",

volume = "7",

pages = "911--917",

journal = "MRS Advances",

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publisher = "Materials Research Society",

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T1 - One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges

AU - Nagao, Iori

AU - Kamataki, Kunihiro

AU - Yamamoto, Akihiro

AU - Otaka, Michihiro

AU - Yamamoto, Yuma

AU - Yamashita, Daisuke

AU - Yamashita, Naoto

AU - Okumura, Takamasa

AU - Itagaki, Naho

AU - Koga, Kazunori

AU - Shiratani, Masaharu

N1 - Funding Information: This study was partly supported by JSPS KAKENHI Grant Number JP20H00142. Publisher Copyright: © 2022, The Author(s), under exclusive licence to The Materials Research Society.

PY - 2022/11

Y1 - 2022/11

N2 - We have investigated the effects of amplitude modulation (AM) discharges especially in differences of AM frequency on plasma parameters such as electric field, electron density, electron temperature, ion energy distribution function (IEDF), and ion angular distribution function (IADF) of capacitively coupled AM discharge Ar plasma using a Particle-in-cell/Monte Carlo collision (PIC-MCC) model. The electron density and the kinetic energy of ions incident on the grounded electrode oscillate periodically with the AM frequency. The oscillation amplitude of the electron density in the central plasma region between the electrodes decreases with increasing the AM frequency above 5 kHz. On the other hand, the peak energy of IEDF decreases with increasing the AM frequency above 500 kHz. Thus, the AM frequency is a good tuning knob to control such plasma parameters.

AB - We have investigated the effects of amplitude modulation (AM) discharges especially in differences of AM frequency on plasma parameters such as electric field, electron density, electron temperature, ion energy distribution function (IEDF), and ion angular distribution function (IADF) of capacitively coupled AM discharge Ar plasma using a Particle-in-cell/Monte Carlo collision (PIC-MCC) model. The electron density and the kinetic energy of ions incident on the grounded electrode oscillate periodically with the AM frequency. The oscillation amplitude of the electron density in the central plasma region between the electrodes decreases with increasing the AM frequency above 5 kHz. On the other hand, the peak energy of IEDF decreases with increasing the AM frequency above 500 kHz. Thus, the AM frequency is a good tuning knob to control such plasma parameters.

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JO - MRS Advances

JF - MRS Advances

SN - 2059-8521

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ER -

One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges

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