One-dimensional Wolter optics with a sub-50 nm spatial resolution

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

We studied an imaging system consisting of an elliptical mirror and a hyperbolic mirror [i.e., one-dimensional (1D) Wolter optics] to realize an achromatic full-field hard x-ray microscopy with a resolution better than 50 nm. We report the performance of this 1D Wolter optical system when the mirrors were ultraprecisely figured by elastic emission machining. Experiments to form a demagnified image (demagnification factor of 385) of a 10 μm slit were conducted at an x-ray energy of 11.5 keV at BL29XUL of SPring-8. The system could form a demagnified image with a resolution better than 50 nm over a 12.1 μm field.

Original languageEnglish
Pages (from-to)3583-3585
Number of pages3
JournalOptics Letters
Volume35
Issue number21
DOIs
Publication statusPublished - Nov 1 2010
Externally publishedYes

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spatial resolution
optics
mirrors
machining
slits
x rays
microscopy
energy

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

Cite this

Matsuyama, S., Wakioka, T., Kidani, N., Kimura, T., Mimura, H., Sano, Y., ... Yamauchi, K. (2010). One-dimensional Wolter optics with a sub-50 nm spatial resolution. Optics Letters, 35(21), 3583-3585. https://doi.org/10.1364/OL.35.003583

One-dimensional Wolter optics with a sub-50 nm spatial resolution. / Matsuyama, S.; Wakioka, T.; Kidani, N.; Kimura, T.; Mimura, H.; Sano, Y.; Nishino, Y.; Yabashi, M.; Tamasaku, K.; Ishikawa, T.; Yamauchi, K.

In: Optics Letters, Vol. 35, No. 21, 01.11.2010, p. 3583-3585.

Research output: Contribution to journalArticle

Matsuyama, S, Wakioka, T, Kidani, N, Kimura, T, Mimura, H, Sano, Y, Nishino, Y, Yabashi, M, Tamasaku, K, Ishikawa, T & Yamauchi, K 2010, 'One-dimensional Wolter optics with a sub-50 nm spatial resolution', Optics Letters, vol. 35, no. 21, pp. 3583-3585. https://doi.org/10.1364/OL.35.003583
Matsuyama S, Wakioka T, Kidani N, Kimura T, Mimura H, Sano Y et al. One-dimensional Wolter optics with a sub-50 nm spatial resolution. Optics Letters. 2010 Nov 1;35(21):3583-3585. https://doi.org/10.1364/OL.35.003583
Matsuyama, S. ; Wakioka, T. ; Kidani, N. ; Kimura, T. ; Mimura, H. ; Sano, Y. ; Nishino, Y. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T. ; Yamauchi, K. / One-dimensional Wolter optics with a sub-50 nm spatial resolution. In: Optics Letters. 2010 ; Vol. 35, No. 21. pp. 3583-3585.
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