Abstract
(Figure Presented) We report the self-assembly of organic-inorganic block copolymers (BCP) in thin-films by simple solvent annealing on unmodified substrates. The resulting vertically oriented lamellae and cylinders are converted to a hard silica mask by a single step highly selective oxygen plasma etching. The size of the resulting nanostructures in the case of cylinders is less than 10 nm.
Original language | English |
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Pages (from-to) | 4334-4338 |
Number of pages | 5 |
Journal | Advanced Materials |
Volume | 21 |
Issue number | 43 |
DOIs | |
Publication status | Published - Nov 20 2009 |
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering