TY - JOUR
T1 - Optical and structural characterization of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films deposited via coaxial arc plasma
AU - Zkria, Abdelrahman
AU - Abdel-Wahab, Fouad
AU - Katamune, Yuki
AU - Yoshitake, Tsuyoshi
N1 - Funding Information:
This work was supported by the Advanced Low Carbon Technology Research and Development Program (ALCA) of the Japan Science and Technology Agency (JST); Japan Society for the Promotion of Science (JSPS KAKENHI Grant No. JP15H04127 , and JP16K18238 ) and Grant-in-Aid for JSPS Fellows (Grant No. JP17F17380 ). The experiment using synchrotron radiation was performed at SAGA-LS with the approval of the Kyushu Synchrotron Light Research Center (Proposal No. 1611105S , BL12).
Funding Information:
This work was supported by the Advanced Low Carbon Technology Research and Development Program (ALCA) of the Japan Science and Technology Agency (JST); Japan Society for the Promotion of Science (JSPS KAKENHI Grant No. JP15H04127, and JP16K18238) and Grant-in-Aid for JSPS Fellows (Grant No. JP17F17380). The experiment using synchrotron radiation was performed at SAGA-LS with the approval of the Kyushu Synchrotron Light Research Center (Proposal No. 1611105S, BL12).
Publisher Copyright:
© 2018 Korean Physical Society
PY - 2019/2
Y1 - 2019/2
N2 - Ultrananocrystalline diamond/hydrogenated amorphous carbon composite films were deposited in the ambient of hydrogen by coaxial arc plasma deposition. The film compositions and chemical bonding structures were investigated by X-ray diffraction, X-ray photoemission and hydrogen forward scattering spectroscopies. The sp3/(sp2+sp3) ratio and hydrogen content in the film were estimated to be 64% and 35 at.%, respectively. The optical parameters and the optical dispersion profile were determined by using a variable angle spectroscopic ellipsometer at 55° 65° and 75° angle of incidence in the photon energy range of 0.9–5 eV. Combinations of multiple Gaussian, and Tauc-Lorentz or Cody-Lorentz dispersion functions are used to reproduce the experimental data. Results of ellipsometry showed a refractive index of approximately 2.05 (at 2eV) and optical band gap of 1.63 eV. The imaginary part of dielectric function exhibited a peak at 3.8 eV, which has assigned to π-π* electron transitions. Furthermore, Electron spin resonance measurements implied the existence of dangling bonds, which might have a partial contribution to the optical absorption properties of the deposited films. A correlation between optical parameters and structural profile of the deposited films is discussed.
AB - Ultrananocrystalline diamond/hydrogenated amorphous carbon composite films were deposited in the ambient of hydrogen by coaxial arc plasma deposition. The film compositions and chemical bonding structures were investigated by X-ray diffraction, X-ray photoemission and hydrogen forward scattering spectroscopies. The sp3/(sp2+sp3) ratio and hydrogen content in the film were estimated to be 64% and 35 at.%, respectively. The optical parameters and the optical dispersion profile were determined by using a variable angle spectroscopic ellipsometer at 55° 65° and 75° angle of incidence in the photon energy range of 0.9–5 eV. Combinations of multiple Gaussian, and Tauc-Lorentz or Cody-Lorentz dispersion functions are used to reproduce the experimental data. Results of ellipsometry showed a refractive index of approximately 2.05 (at 2eV) and optical band gap of 1.63 eV. The imaginary part of dielectric function exhibited a peak at 3.8 eV, which has assigned to π-π* electron transitions. Furthermore, Electron spin resonance measurements implied the existence of dangling bonds, which might have a partial contribution to the optical absorption properties of the deposited films. A correlation between optical parameters and structural profile of the deposited films is discussed.
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U2 - 10.1016/j.cap.2018.11.012
DO - 10.1016/j.cap.2018.11.012
M3 - Article
AN - SCOPUS:85058221900
VL - 19
SP - 143
EP - 148
JO - Current Applied Physics
JF - Current Applied Physics
SN - 1567-1739
IS - 2
ER -