Optical image analysis of the novel ultra-lightweight and high-resolution MEMS X-ray optics

Ikuyuki Mitsuishi, Yuichiro Ezoe, Utako Takagi, Kensuke Ishizu, Teppei Moriyama, Takayuki Hayashi, Takuro Sato, Kohei Morishita, Kazuo Nakajima, Noriko Y. Yamasaki, Kazuhisa Mitsuda

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

We have been developing novel microelectromechanical systems X-ray optics for future satellites. It can be ultra-lightweight and of high-resolution. For the first time, we fabricated a spherical test optics made of silicon. We used the dry etching and hot plastic deformation method. We conducted imaging tests to examine whether it can focus a parallel beam of light. Visible light was selected instead of X-rays because of the convenience of testing. The focusing was confirmed with a fullwidth at half-maximum focal size of 2 arcmin. Since the focus is affected by optical diffraction, a smaller focus can be expected in future X-ray imaging tests.

Original languageEnglish
Pages (from-to)1309-1312
Number of pages4
JournalIEEE Journal of Quantum Electronics
Volume46
Issue number9
DOIs
Publication statusPublished - Sep 17 2010
Externally publishedYes

Fingerprint

X ray optics
Optical resolving power
geometrical optics
image analysis
Image analysis
microelectromechanical systems
MEMS
high resolution
Imaging techniques
X rays
Dry etching
x rays
Optics
Plastic deformation
Diffraction
Satellites
plastic deformation
Silicon
etching
Testing

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Mitsuishi, I., Ezoe, Y., Takagi, U., Ishizu, K., Moriyama, T., Hayashi, T., ... Mitsuda, K. (2010). Optical image analysis of the novel ultra-lightweight and high-resolution MEMS X-ray optics. IEEE Journal of Quantum Electronics, 46(9), 1309-1312. https://doi.org/10.1109/JQE.2010.2050764

Optical image analysis of the novel ultra-lightweight and high-resolution MEMS X-ray optics. / Mitsuishi, Ikuyuki; Ezoe, Yuichiro; Takagi, Utako; Ishizu, Kensuke; Moriyama, Teppei; Hayashi, Takayuki; Sato, Takuro; Morishita, Kohei; Nakajima, Kazuo; Yamasaki, Noriko Y.; Mitsuda, Kazuhisa.

In: IEEE Journal of Quantum Electronics, Vol. 46, No. 9, 17.09.2010, p. 1309-1312.

Research output: Contribution to journalArticle

Mitsuishi, I, Ezoe, Y, Takagi, U, Ishizu, K, Moriyama, T, Hayashi, T, Sato, T, Morishita, K, Nakajima, K, Yamasaki, NY & Mitsuda, K 2010, 'Optical image analysis of the novel ultra-lightweight and high-resolution MEMS X-ray optics', IEEE Journal of Quantum Electronics, vol. 46, no. 9, pp. 1309-1312. https://doi.org/10.1109/JQE.2010.2050764
Mitsuishi, Ikuyuki ; Ezoe, Yuichiro ; Takagi, Utako ; Ishizu, Kensuke ; Moriyama, Teppei ; Hayashi, Takayuki ; Sato, Takuro ; Morishita, Kohei ; Nakajima, Kazuo ; Yamasaki, Noriko Y. ; Mitsuda, Kazuhisa. / Optical image analysis of the novel ultra-lightweight and high-resolution MEMS X-ray optics. In: IEEE Journal of Quantum Electronics. 2010 ; Vol. 46, No. 9. pp. 1309-1312.
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