Abstract
We demonstrated an extremely small optical displacement sensor using a laser diode integrated with a microlens and based on the composite cavity principle, which is that the light output power from the laser diode changes with reflectance and displacement of the third mirror. The light output power from the device was modulated by the reflectance of the third mirror with the displacement in the lateral direction. The modulation depth was 0.1 when the third mirror reflectances were 70% and 4%, and the resolution in the lateral direction was 3 μm. The light output power was also modulated by the third mirror displacement in the axial direction with a period of 0.4 mu m, and a modulation depth of 0.047 was obtained.
| Original language | English |
|---|---|
| Pages (from-to) | 140-146 |
| Number of pages | 7 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 4 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - Sep 1994 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering
Cite this
Optical micro displacement sensor using a composite cavity laser diode integrated with a microlens. / Shimada, Jun Ichi; Katagiri, Yoshitada; Ohguchi, Osamu; Sawada, Renshi.
In: Journal of Micromechanics and Microengineering, Vol. 4, No. 3, 09.1994, p. 140-146.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Optical micro displacement sensor using a composite cavity laser diode integrated with a microlens
AU - Shimada, Jun Ichi
AU - Katagiri, Yoshitada
AU - Ohguchi, Osamu
AU - Sawada, Renshi
PY - 1994/9
Y1 - 1994/9
N2 - We demonstrated an extremely small optical displacement sensor using a laser diode integrated with a microlens and based on the composite cavity principle, which is that the light output power from the laser diode changes with reflectance and displacement of the third mirror. The light output power from the device was modulated by the reflectance of the third mirror with the displacement in the lateral direction. The modulation depth was 0.1 when the third mirror reflectances were 70% and 4%, and the resolution in the lateral direction was 3 μm. The light output power was also modulated by the third mirror displacement in the axial direction with a period of 0.4 mu m, and a modulation depth of 0.047 was obtained.
AB - We demonstrated an extremely small optical displacement sensor using a laser diode integrated with a microlens and based on the composite cavity principle, which is that the light output power from the laser diode changes with reflectance and displacement of the third mirror. The light output power from the device was modulated by the reflectance of the third mirror with the displacement in the lateral direction. The modulation depth was 0.1 when the third mirror reflectances were 70% and 4%, and the resolution in the lateral direction was 3 μm. The light output power was also modulated by the third mirror displacement in the axial direction with a period of 0.4 mu m, and a modulation depth of 0.047 was obtained.
UR - http://www.scopus.com/inward/record.url?scp=0028510162&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0028510162&partnerID=8YFLogxK
U2 - 10.1088/0960-1317/4/3/007
DO - 10.1088/0960-1317/4/3/007
M3 - Article
AN - SCOPUS:0028510162
VL - 4
SP - 140
EP - 146
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
SN - 0960-1317
IS - 3
ER -