Optical microsensors integrated on a silicon chip

Eiji Higurashi, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The hybrid integration of various optical microcomponents, such as laser diodes, photodiodes, and gratings, on a silicon micromachined substrate by passive optical alignment (optical surface mount technology) has opened up many new possibilities in constructing highly functional, reliable, and low-cost optical microsensors. Using this technology, various microsensors, including a high-resolution encoder that can measure the displacement or revolution angle and a blood flow sensor that can monitor blood flow in human skin, have been developed.

Original languageEnglish
Title of host publicationProceedings of IEEE Sensors
Number of pages2
Publication statusPublished - 2003
Externally publishedYes
EventSecond International Conference on Sensors: IEEE Sensors 2003 - Toronto, Ont., Canada
Duration: Oct 22 2003Oct 24 2003


OtherSecond International Conference on Sensors: IEEE Sensors 2003
CityToronto, Ont.

All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering


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