Optical microsensors integration technologies for biomedical applications

Eiji Higurashi, Renshi Sawada, Tadatomo Suga

    Research output: Contribution to journalArticlepeer-review

    11 Citations (Scopus)

    Abstract

    This paper focuses on optical integration technology and its application in optical microsensors used in biomedical fields. The integration is based on the hybrid integration approach, achieving high performance, small size and weight, and lower cost. First, we describe the key technologies used in hybrid integration, namely passive alignment technology, low temperature bonding technology, and packaging technology for realizing advanced microsensors. Then, we describe an integrated laser Doppler flowmeter that can monitor blood flow in human skin.

    Original languageEnglish
    Pages (from-to)231-238
    Number of pages8
    JournalIEICE Transactions on Electronics
    VolumeE92-C
    Issue number2
    DOIs
    Publication statusPublished - Jan 1 2009

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Electrical and Electronic Engineering

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