Optical properties of polycrystalline and epitaxial anatase and rutile TiO 2 thin films by rf magnetron sputtering

S. Tanemura, L. Miao, P. Jin, Kenji Kaneko, A. Terai, N. Nabatova-Gabain

Research output: Contribution to journalArticle

142 Citations (Scopus)

Abstract

We analyzed successfully the refractive index n, extinction coefficient k, and optical band gap E g of the fabricated polycrystalline and epitaxial TiO 2 films of rutile and anatase films by spectroscopic ellipsometry (SE). The provided samples were prepared by rf magnetron sputtering of TiO 2 target with Ar gas plasma under a variety of sputtering parameters such as total pressure, Ar gas flow rate, O 2 gas flow rate, applied sputtering power, substrate temperature and substrate materials. The covered wavelength for SE was from 0.75 to 5eV (1653-248nm in wavelength). As the conclusion, the films show higher values of refractive indices than the previously reported ones by other authors. Optical band gaps extrapolated by Tauc plot using the obtained extinction coefficient again show higher values than the known bulk data.

Original languageEnglish
Pages (from-to)654-660
Number of pages7
JournalApplied Surface Science
Volume212-213
Issue numberSPEC.
DOIs
Publication statusPublished - May 15 2003

Fingerprint

Magnetron sputtering
Titanium dioxide
Spectroscopic ellipsometry
Optical properties
Optical band gaps
Thin films
Sputtering
Flow of gases
Refractive index
Flow rate
Plasma Gases
Wavelength
Substrates
Plasmas
Gases
titanium dioxide
Temperature

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Optical properties of polycrystalline and epitaxial anatase and rutile TiO 2 thin films by rf magnetron sputtering . / Tanemura, S.; Miao, L.; Jin, P.; Kaneko, Kenji; Terai, A.; Nabatova-Gabain, N.

In: Applied Surface Science, Vol. 212-213, No. SPEC., 15.05.2003, p. 654-660.

Research output: Contribution to journalArticle

Tanemura, S. ; Miao, L. ; Jin, P. ; Kaneko, Kenji ; Terai, A. ; Nabatova-Gabain, N. / Optical properties of polycrystalline and epitaxial anatase and rutile TiO 2 thin films by rf magnetron sputtering In: Applied Surface Science. 2003 ; Vol. 212-213, No. SPEC. pp. 654-660.
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AU - Terai, A.

AU - Nabatova-Gabain, N.

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