Optically controlled surface sensing probe enhanced by radially polarized beam

Masaki Michihata; Yasuhiro Takaya; Terutake Hayashi

Optically controlled surface sensing probe enhanced by radially polarized beam

Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi

Research output: Contribution to conference › Paper › peer-review

Abstract

A micro-probe based on laser trapping is proposed for the micro-probe system of a nano-coordinate measuring machine. This study focused on the "shadow effect," which is the case wherein a partial beam for laser trapping is shaded by the specimen. A radially polarized beam was introduced to improve laser shading. As a result, the trapping efficiency was increased by 3.2 times. This high-efficient laser trapping made it possible for the proposed probe to measure the vertical surface under the shadow effect. The advantage of using radial polarization was confirmed via a measurement of the micro-groove profile.

Original language	English
Publication status	Published - 2011
Externally published	Yes
Event	6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 - Omiya Sonic City, Saitama, Japan Duration: Nov 8 2011 → Nov 10 2011

Other

Other	6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011
Country/Territory	Japan
City	Omiya Sonic City, Saitama
Period	11/8/11 → 11/10/11

All Science Journal Classification (ASJC) codes

Industrial and Manufacturing Engineering

Cite this

@conference{64f24794c5d44fa48b2ec8c4389cb954,

title = "Optically controlled surface sensing probe enhanced by radially polarized beam",

abstract = "A micro-probe based on laser trapping is proposed for the micro-probe system of a nano-coordinate measuring machine. This study focused on the {"}shadow effect,{"} which is the case wherein a partial beam for laser trapping is shaded by the specimen. A radially polarized beam was introduced to improve laser shading. As a result, the trapping efficiency was increased by 3.2 times. This high-efficient laser trapping made it possible for the proposed probe to measure the vertical surface under the shadow effect. The advantage of using radial polarization was confirmed via a measurement of the micro-groove profile.",

author = "Masaki Michihata and Yasuhiro Takaya and Terutake Hayashi",

year = "2011",

language = "English",

note = "6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 ; Conference date: 08-11-2011 Through 10-11-2011",

}

TY - CONF

T1 - Optically controlled surface sensing probe enhanced by radially polarized beam

AU - Michihata, Masaki

AU - Takaya, Yasuhiro

AU - Hayashi, Terutake

PY - 2011

Y1 - 2011

N2 - A micro-probe based on laser trapping is proposed for the micro-probe system of a nano-coordinate measuring machine. This study focused on the "shadow effect," which is the case wherein a partial beam for laser trapping is shaded by the specimen. A radially polarized beam was introduced to improve laser shading. As a result, the trapping efficiency was increased by 3.2 times. This high-efficient laser trapping made it possible for the proposed probe to measure the vertical surface under the shadow effect. The advantage of using radial polarization was confirmed via a measurement of the micro-groove profile.

AB - A micro-probe based on laser trapping is proposed for the micro-probe system of a nano-coordinate measuring machine. This study focused on the "shadow effect," which is the case wherein a partial beam for laser trapping is shaded by the specimen. A radially polarized beam was introduced to improve laser shading. As a result, the trapping efficiency was increased by 3.2 times. This high-efficient laser trapping made it possible for the proposed probe to measure the vertical surface under the shadow effect. The advantage of using radial polarization was confirmed via a measurement of the micro-groove profile.

UR - http://www.scopus.com/inward/record.url?scp=84883341485&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84883341485&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:84883341485

T2 - 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011

Y2 - 8 November 2011 through 10 November 2011

ER -

Optically controlled surface sensing probe enhanced by radially polarized beam

Abstract

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All Science Journal Classification (ASJC) codes

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