Optically controlled surface sensing probe enhanced by radially polarized beam

Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi

Research output: Contribution to conferencePaper

Abstract

A micro-probe based on laser trapping is proposed for the micro-probe system of a nano-coordinate measuring machine. This study focused on the "shadow effect," which is the case wherein a partial beam for laser trapping is shaded by the specimen. A radially polarized beam was introduced to improve laser shading. As a result, the trapping efficiency was increased by 3.2 times. This high-efficient laser trapping made it possible for the proposed probe to measure the vertical surface under the shadow effect. The advantage of using radial polarization was confirmed via a measurement of the micro-groove profile.

Original languageEnglish
Publication statusPublished - Dec 1 2011
Event6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 - Omiya Sonic City, Saitama, Japan
Duration: Nov 8 2011Nov 10 2011

Other

Other6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011
CountryJapan
CityOmiya Sonic City, Saitama
Period11/8/1111/10/11

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Polarization
Lasers
Coordinate measuring machines

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering

Cite this

Michihata, M., Takaya, Y., & Hayashi, T. (2011). Optically controlled surface sensing probe enhanced by radially polarized beam. Paper presented at 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, Omiya Sonic City, Saitama, Japan.

Optically controlled surface sensing probe enhanced by radially polarized beam. / Michihata, Masaki; Takaya, Yasuhiro; Hayashi, Terutake.

2011. Paper presented at 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, Omiya Sonic City, Saitama, Japan.

Research output: Contribution to conferencePaper

Michihata, M, Takaya, Y & Hayashi, T 2011, 'Optically controlled surface sensing probe enhanced by radially polarized beam' Paper presented at 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, Omiya Sonic City, Saitama, Japan, 11/8/11 - 11/10/11, .
Michihata M, Takaya Y, Hayashi T. Optically controlled surface sensing probe enhanced by radially polarized beam. 2011. Paper presented at 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, Omiya Sonic City, Saitama, Japan.
Michihata, Masaki ; Takaya, Yasuhiro ; Hayashi, Terutake. / Optically controlled surface sensing probe enhanced by radially polarized beam. Paper presented at 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, Omiya Sonic City, Saitama, Japan.
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