Optically controlled surface sensing probe enhanced by radially polarized beam

Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi

Research output: Contribution to conferencePaperpeer-review

Abstract

A micro-probe based on laser trapping is proposed for the micro-probe system of a nano-coordinate measuring machine. This study focused on the "shadow effect," which is the case wherein a partial beam for laser trapping is shaded by the specimen. A radially polarized beam was introduced to improve laser shading. As a result, the trapping efficiency was increased by 3.2 times. This high-efficient laser trapping made it possible for the proposed probe to measure the vertical surface under the shadow effect. The advantage of using radial polarization was confirmed via a measurement of the micro-groove profile.

Original languageEnglish
Publication statusPublished - 2011
Externally publishedYes
Event6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 - Omiya Sonic City, Saitama, Japan
Duration: Nov 8 2011Nov 10 2011

Other

Other6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011
CountryJapan
CityOmiya Sonic City, Saitama
Period11/8/1111/10/11

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering

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