@inproceedings{5d6765481cd54d7f862be19e5a244a57,
title = "Optimal character-size exploration for increasing throughput of MCC lithographic systems",
abstract = "We propose a character size optimization technique to enhance throughput of multi-column-cell (MCC) lithographic systems in which transistor patterns are projected with multiple column cells in parallel. Each and every column cell is capable of projecting patterns with character projection (CP) and variable shaped beam (VSB) methods. Seeking the optimal character size of characters contributes to minimizing the number of EB shots and reducing the fabrication cost for ICs. Experimental results show that the character size optimization technique reduced 70.6% of EB shots in the best case with an available electron beam size.",
author = "Makoto Sugihara",
year = "2009",
month = jun,
day = "19",
doi = "10.1117/12.813884",
language = "English",
isbn = "9780819475244",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Alternative Lithographic Technologies",
note = "Alternative Lithographic Technologies ; Conference date: 24-02-2009 Through 26-02-2009",
}