Ordering distance of surface nanofacets on vicinal 4H-SiC(0001)

Masahiro Fujii, Tanaka Satoru

Research output: Contribution to journalArticle

33 Citations (Scopus)

Abstract

After high-temperature H2 etching, vicinal SiC(0001) surfaces showed periodically ordered nanofacet structures consisting of pairs of (0001) and (112̄n). Here, we found that the characteristic ordering distance of ∼10nm is independent of the vicinal angle (4°-8°off). However, fluctuation in the ordering distance is dependent on the vicinal angle. The 5.7°off surface showed superior periodicity. The classical elastic theory of a surface predicted the characteristic (constant) ordering distance but not the fluctuation in ordering periodicity. By introducing "quantized step bunching" due to periodic surface energy, which is unique to polymorphic SiC, the fluctuation is described.

Original languageEnglish
Article number016102
JournalPhysical Review Letters
Volume99
Issue number1
DOIs
Publication statusPublished - Jul 5 2007

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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