Parylene C is an inert, hydrophobic, flexible and biocompatible polymer coating material, which has recently found broad MEMS and BioMEMS applications including microstructures, micro sensors and actuators. As a result, many researches have been conducted by focusing on the utilization of Parylene C thin films. Little attention, however, was paid to and rare was known about the mechanical properties of the thin films that may subject to severe tension, bending, twisting or the combination of these loading, especially in biomedical implants in which strength reliability must be secured during a reasonable lifetime. The objective of the present study, therefore, is to investigate the tensile properties of Parylene C thin films fabricated by micromachining process in the range of thickness from submicron to tens of microns. The effect of sample thickness is discussed.