Particle growth in hydrogen-methane plasmas

T. Shimizu, W. Jacob, H. Thomas, G. Morfill, T. Abe, Yukio Watanabe, N. Sato

Research output: Contribution to journalArticle

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Abstract

Particle growth and the behavior of particle clouds in hydrogen-methane capacitively coupled rf plasmas are investigated. At room temperature, most for different wall temperatures and gas compositions of these particles are due to flakes of layers delaminated from the electrode surfaces. Heating of the electrodes up to 800 K and dilution by hydrogen (up to H2:CH 4 = 20:1) suppresses the production of the particles from the electrode surfaces. The electron temperature in the particle levitation region is controlled by introducing an additional electrode made from a grid (= gridded electrode) in between the levitation electrode and the driven electrode. If we introduce diamond seed particles (∼ 2.8 μm in diameter) into the plasma with the gridded electrode in place, we observe nucleation of new grains (∼ 100 nm) on the surfaces of the diamond particles. On the other hand, without the gridded electrode, we do not observe nucleation but growth of amorphous carbon films on them.

Original languageEnglish
Pages (from-to)652-655
Number of pages4
JournalThin Solid Films
Volume506-507
DOIs
Publication statusPublished - May 26 2006

Fingerprint

Methane
Hydrogen
methane
Plasmas
Electrodes
electrodes
hydrogen
Diamond
levitation
Diamonds
Nucleation
diamonds
nucleation
Carbon films
Electron temperature
flakes
wall temperature
gas composition
Amorphous carbon
Amorphous films

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Shimizu, T., Jacob, W., Thomas, H., Morfill, G., Abe, T., Watanabe, Y., & Sato, N. (2006). Particle growth in hydrogen-methane plasmas. Thin Solid Films, 506-507, 652-655. https://doi.org/10.1016/j.tsf.2005.08.059

Particle growth in hydrogen-methane plasmas. / Shimizu, T.; Jacob, W.; Thomas, H.; Morfill, G.; Abe, T.; Watanabe, Yukio; Sato, N.

In: Thin Solid Films, Vol. 506-507, 26.05.2006, p. 652-655.

Research output: Contribution to journalArticle

Shimizu, T, Jacob, W, Thomas, H, Morfill, G, Abe, T, Watanabe, Y & Sato, N 2006, 'Particle growth in hydrogen-methane plasmas', Thin Solid Films, vol. 506-507, pp. 652-655. https://doi.org/10.1016/j.tsf.2005.08.059
Shimizu T, Jacob W, Thomas H, Morfill G, Abe T, Watanabe Y et al. Particle growth in hydrogen-methane plasmas. Thin Solid Films. 2006 May 26;506-507:652-655. https://doi.org/10.1016/j.tsf.2005.08.059
Shimizu, T. ; Jacob, W. ; Thomas, H. ; Morfill, G. ; Abe, T. ; Watanabe, Yukio ; Sato, N. / Particle growth in hydrogen-methane plasmas. In: Thin Solid Films. 2006 ; Vol. 506-507. pp. 652-655.
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