Partly three-dimensional global modeling of a silicon Czochralski furnace. II. Model application: Analysis of a silicon Czochralski furnace in a transverse magnetic field

Lijun Liu, Koichi Kakimoto

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

A three-dimensional (3D) global analysis was carried out numerically for a small silicon Czochralski (CZ) furnace in a transverse magnetic field by a proposed 3D global model. The modeling was conducted with moderate requirements of computer resources and computation time. Most 3D features of the melt flow and thermal field in the furnace could be reproduced in the modeling. The results showed that the melt-crystal interface shape is three-dimensional and temperature difference over the circumference on the crystal and crucible sidewalls is prominent. The non-uniformity of temperature in the azimuthal direction decreases with increase in distance from the melt region. The influence of a transverse magnetic field on the flow pattern of melt and global thermal field in the furnace was analyzed.

Original languageEnglish
Pages (from-to)4492-4497
Number of pages6
JournalInternational Journal of Heat and Mass Transfer
Volume48
Issue number21-22
DOIs
Publication statusPublished - Oct 1 2005

Fingerprint

Silicon
furnaces
Furnaces
Magnetic fields
flow distribution
silicon
magnetic fields
Crystals
circumferences
Crucibles
crucibles
nonuniformity
Flow patterns
crystals
temperature gradients
resources
Temperature
requirements
temperature
Hot Temperature

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

Cite this

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title = "Partly three-dimensional global modeling of a silicon Czochralski furnace. II. Model application: Analysis of a silicon Czochralski furnace in a transverse magnetic field",
abstract = "A three-dimensional (3D) global analysis was carried out numerically for a small silicon Czochralski (CZ) furnace in a transverse magnetic field by a proposed 3D global model. The modeling was conducted with moderate requirements of computer resources and computation time. Most 3D features of the melt flow and thermal field in the furnace could be reproduced in the modeling. The results showed that the melt-crystal interface shape is three-dimensional and temperature difference over the circumference on the crystal and crucible sidewalls is prominent. The non-uniformity of temperature in the azimuthal direction decreases with increase in distance from the melt region. The influence of a transverse magnetic field on the flow pattern of melt and global thermal field in the furnace was analyzed.",
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AB - A three-dimensional (3D) global analysis was carried out numerically for a small silicon Czochralski (CZ) furnace in a transverse magnetic field by a proposed 3D global model. The modeling was conducted with moderate requirements of computer resources and computation time. Most 3D features of the melt flow and thermal field in the furnace could be reproduced in the modeling. The results showed that the melt-crystal interface shape is three-dimensional and temperature difference over the circumference on the crystal and crucible sidewalls is prominent. The non-uniformity of temperature in the azimuthal direction decreases with increase in distance from the melt region. The influence of a transverse magnetic field on the flow pattern of melt and global thermal field in the furnace was analyzed.

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