Patterning of CVD diamond films by seeding and their field emission properties

Satoshi Katsumata, Yoshimichi Oobuchi, Tanemasa Asano

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Selective seeding for growing diamond on Si substrates was performed by conventional lithography using photoresist mixed with fine diamond particles. The selectivity was improved by filtering the diamond powder-photoresist mixture and carrying out reactive ion etching of patterned substrates. As a result, a selectivity up to 2.0 × 102 or higher was achieved. The resolution was of the order of 1 μm. Field emission from diamonds prepared using this selective growth method was observed without any postgrowth treatment. The measured current vs. voltage plot of a diode showed a rectifying characteristic. Under a forward bias, a current of about 15 μA was obtained at about 570 V, with a turn-on voltage of about 480 V. The emission current was comparable with that which had been observed for Si field emitter tips.

Original languageEnglish
Pages (from-to)1296-1300
Number of pages5
JournalDiamond and Related Materials
Volume3
Issue number11-12
DOIs
Publication statusPublished - Jan 1 1994
Externally publishedYes

Fingerprint

Diamond
Diamond films
Field emission
Chemical vapor deposition
Diamonds
Photoresists
Reactive ion etching
Electric potential
Substrates
Powders
Lithography
Diodes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

Patterning of CVD diamond films by seeding and their field emission properties. / Katsumata, Satoshi; Oobuchi, Yoshimichi; Asano, Tanemasa.

In: Diamond and Related Materials, Vol. 3, No. 11-12, 01.01.1994, p. 1296-1300.

Research output: Contribution to journalArticle

Katsumata, Satoshi ; Oobuchi, Yoshimichi ; Asano, Tanemasa. / Patterning of CVD diamond films by seeding and their field emission properties. In: Diamond and Related Materials. 1994 ; Vol. 3, No. 11-12. pp. 1296-1300.
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