Performance improvement of a discharge-pumped ArF excimer laser by xenon gas addition

Naoki Kataoka, Motoya Itagaki, Kiichiro Uchino, Katsunori Muraoka, Akihiko Takahashi, Tatsuo Okada, Mitsuo Maeda, Tsukasa Hori, Katsutomo Terashima, Akira Sumitani, Tatsuo Enami, Hakaru Mizoguchi

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7 Citations (Scopus)

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Engineering & Materials Science

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