Persistent electronic conduction in 12CaO·7Al2O 3 thin films produced by Ar ion implantation: Selective kick-out effect leads to electride thin films

Masashi Miyakawa, Katsuro Hayashi, Yoshitake Toda, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

Research output: Contribution to journalConference article

Abstract

A new method to convert 12CaO·7Al2O3 (C12A7) thin films to electronic conductor by hot Ar+ ion implantation has been developed and its mechanism is discussed. It was found that hot Ar + ion implantation extruded free O2- ions in C12A7 films by kick-out effects at fluences higher than 1×1017 cm -2, which left electrons in the cages embedded in C12A7 crystal and produced high concentration F+-like centers (∼1.4×10 21 cm-3). The resulting films show coloration and persistent electronic conduction with conductivities up to ∼1 Scm -1. On the other hand, fluences less than 1×1017 cm-2 kept the films transparent and insulating.

Original languageEnglish
Pages (from-to)385-389
Number of pages5
JournalMaterials Research Society Symposium Proceedings
Volume811
DOIs
Publication statusPublished - Jan 1 2004
EventIntegration of Advanced Micro- and Nanoelectronic Devices - Critical Issues and Solutions - San Francisco, CA, United States
Duration: Apr 13 2004Apr 16 2004

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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