Thin-film couples of BiSbTe and Pt were deposited by RF sputtering and patterned by lift-off technique to form thermopile structures. To fabricate a planar micro-TE-generator, 11 thermopiles are connected in series as an array and Pt-loaded alumina ceramic catalyst was deposited on the thermopile as a combustor layer. The combustion and TE performance of the generator was investigated flowing 3 v/v% hydrogen in air into the test chamber; the average temperature gradient of eleven thermopiles developed between the hot and cold junctions of thermopiles was 50.6 K, and 1.9 μW of power was generated.
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Physics and Astronomy(all)