Planar-type thermoelectric micro devices using ceramic catalytic combustor

Woosuck Shin, Takaomi Nakashima, Maiko Nishibori, Noriya Izu, Toshio Itoh, Ichiro Matsubara

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Thin-film couples of BiSbTe and Pt were deposited by RF sputtering and patterned by lift-off technique to form thermopile structures. To fabricate a planar micro-TE-generator, 11 thermopiles are connected in series as an array and Pt-loaded alumina ceramic catalyst was deposited on the thermopile as a combustor layer. The combustion and TE performance of the generator was investigated flowing 3 v/v% hydrogen in air into the test chamber; the average temperature gradient of eleven thermopiles developed between the hot and cold junctions of thermopiles was 50.6 K, and 1.9 μW of power was generated.

Original languageEnglish
JournalCurrent Applied Physics
Volume11
Issue number4 SUPPL.
DOIs
Publication statusPublished - Jul 1 2011

Fingerprint

Thermopiles
thermopiles
combustion chambers
Combustors
ceramics
generators
test chambers
Aluminum Oxide
Thermal gradients
Sputtering
Hydrogen
temperature gradients
Alumina
aluminum oxides
sputtering
catalysts
Thin films
Catalysts
air
hydrogen

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Physics and Astronomy(all)

Cite this

Planar-type thermoelectric micro devices using ceramic catalytic combustor. / Shin, Woosuck; Nakashima, Takaomi; Nishibori, Maiko; Izu, Noriya; Itoh, Toshio; Matsubara, Ichiro.

In: Current Applied Physics, Vol. 11, No. 4 SUPPL., 01.07.2011.

Research output: Contribution to journalArticle

Shin, Woosuck ; Nakashima, Takaomi ; Nishibori, Maiko ; Izu, Noriya ; Itoh, Toshio ; Matsubara, Ichiro. / Planar-type thermoelectric micro devices using ceramic catalytic combustor. In: Current Applied Physics. 2011 ; Vol. 11, No. 4 SUPPL.
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