Planar-type thermoelectric micro devices using ceramic catalytic combustor

Woosuck Shin, Takaomi Nakashima, Maiko Nishibori, Noriya Izu, Toshio Itoh, Ichiro Matsubara

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


Thin-film couples of BiSbTe and Pt were deposited by RF sputtering and patterned by lift-off technique to form thermopile structures. To fabricate a planar micro-TE-generator, 11 thermopiles are connected in series as an array and Pt-loaded alumina ceramic catalyst was deposited on the thermopile as a combustor layer. The combustion and TE performance of the generator was investigated flowing 3 v/v% hydrogen in air into the test chamber; the average temperature gradient of eleven thermopiles developed between the hot and cold junctions of thermopiles was 50.6 K, and 1.9 μW of power was generated.

Original languageEnglish
JournalCurrent Applied Physics
Issue number4 SUPPL.
Publication statusPublished - Jul 1 2011
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Physics and Astronomy(all)

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