Plasma breaking of thin films into nano-sized catalysts for carbon nanotube synthesis

J. S. Gao, K. Umeda, K. Uchino, H. Nakashima, K. Muraoka

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23 Citations (Scopus)

Abstract

Iron thin films deposited by pulse laser deposition (PLD) were broken into uniform nano-sized catalysts by plasma bombardment for carbon nanotube (CNT) synthesis. Size distributions of broken catalysts were obtained in terms of plasma discharge conditions. Vertically arranged high-density (1013 per m2) CNTs were synthesized using microwave plasma chemical vapor deposition (MP-CVD) system and the gas mixture of N2 and CH4 on optimally broken catalysts with few carbonaceous particles on a large area Si substrate. Scanning electron microscopy (SEM), transmission electron microscopy (TEM) and Raman spectroscopy (RS) were used to evaluate the obtained CNTs.

Original languageEnglish
Pages (from-to)308-313
Number of pages6
JournalMaterials Science and Engineering A
Volume352
Issue number1-2
DOIs
Publication statusPublished - Jul 15 2003

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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