Plasma diagnostics during pulsed laser deposition of diamond-like carbon using single crystal graphite and amorphous carbon

Y. Yamagata, A. Sharma, J. Narayan, R. M. Mayo, J. W. Newman, K. Ebihara

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

Optical emission study of ablation plasma plumes from single crystal graphite (SCG) and amorphous carbon (a-C) targets during the preparation of diamond-like carbon (DLC) films by KrF excimer pulsed laser deposition (PLD) has been investigated. The C I emission intensity increases with laser energy density (EL) increase, while the C2 emission changes drastically with EL for both ablated plasma plumes. The C2/C emission intensity ratio for the a-C plume decreases with EL increase, while the C2/C ratio for the SCG plume decreases with EL increase up to 3.0 J/cm2, then increases slightly with further EL increase. Nanohardness of the DLC films decreases with the C2/C ratio increase. It is suggested that the C2 molecule in the plasma plume does not play an important role in producing high quality DLC films, and that the C2/C ratio is a good parameter to monitor the PLD process.

Original languageEnglish
Pages (from-to)255-260
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume593
Publication statusPublished - Dec 3 2000
Externally publishedYes
EventSymposium-Amorphous and Nanoestructured Carbon - Boston, MA, USA
Duration: Nov 29 1999Dec 2 1999

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this