TY - JOUR
T1 - Plasma phase oxidation during preparation of oxide superconducting and ferroelectric thin films using pulsed laser deposition
AU - Yamagata, Yukihiko
AU - Kurogi, Hiromitsu
AU - Ikegami, Tomoaki
AU - Ebihara, Kenji
N1 - Funding Information:
The authors wish to thank Mr. K. Shinohara for his experimental help. This work was supported in part by the financial help of the Sagawa Foundation for Promotion of Frontier Science and Kyushu Electric Power Co.
PY - 1997/2
Y1 - 1997/2
N2 - Plasma phase oxidation was investigated during preparation of Y-Ba-Cu-O (YBCO) superconducting and Pb-Zr-Ti-O (PZT) ferroelectric thin films using KrF pulsed laser deposition. The YBCO and PZT plasma plumes were produced at a laser fluence of 0.1 to 6 J/cm 2 , a mixture ambient of oxygen and argon and a pressure range of 10 -6 -1 Torr. In the YBCO ablation, YO and BaO molecules are formed in the ablation plasma with different reactivities, while most of the CuO molecules are ejected from the target. In the PZT film preparation, TiO molecules are generated in the plasma phase. Plasma phase oxidation affects strongly the characteristics of oxide superconducting and ferroelectric thin films.
AB - Plasma phase oxidation was investigated during preparation of Y-Ba-Cu-O (YBCO) superconducting and Pb-Zr-Ti-O (PZT) ferroelectric thin films using KrF pulsed laser deposition. The YBCO and PZT plasma plumes were produced at a laser fluence of 0.1 to 6 J/cm 2 , a mixture ambient of oxygen and argon and a pressure range of 10 -6 -1 Torr. In the YBCO ablation, YO and BaO molecules are formed in the ablation plasma with different reactivities, while most of the CuO molecules are ejected from the target. In the PZT film preparation, TiO molecules are generated in the plasma phase. Plasma phase oxidation affects strongly the characteristics of oxide superconducting and ferroelectric thin films.
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U2 - 10.1016/S0169-4332(96)00642-3
DO - 10.1016/S0169-4332(96)00642-3
M3 - Article
AN - SCOPUS:0031076491
SN - 0169-4332
VL - 109-110
SP - 611
EP - 615
JO - Applied Surface Science
JF - Applied Surface Science
ER -