Plasma phase oxidation during preparation of oxide superconducting and ferroelectric thin films using pulsed laser deposition

Yukihiko Yamagata, Hiromitsu Kurogi, Tomoaki Ikegami, Kenji Ebihara

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Plasma phase oxidation was investigated during preparation of Y-Ba-Cu-O (YBCO) superconducting and Pb-Zr-Ti-O (PZT) ferroelectric thin films using KrF pulsed laser deposition. The YBCO and PZT plasma plumes were produced at a laser fluence of 0.1 to 6 J/cm 2 , a mixture ambient of oxygen and argon and a pressure range of 10 -6 -1 Torr. In the YBCO ablation, YO and BaO molecules are formed in the ablation plasma with different reactivities, while most of the CuO molecules are ejected from the target. In the PZT film preparation, TiO molecules are generated in the plasma phase. Plasma phase oxidation affects strongly the characteristics of oxide superconducting and ferroelectric thin films.

Original languageEnglish
Pages (from-to)611-615
Number of pages5
JournalApplied Surface Science
Volume109-110
DOIs
Publication statusPublished - Jan 1 1997
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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