Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units

Yuichi Setsuhara; Ken Cho; Kosuke Takenaka; Akinori Ebe; Masaharu Shiratani; Makoto Sekine; Masaru Hori; Eiji Ikenaga; Hiroki Kondo; Osamu Nakatsuka; Shigeaki Zaima

doi:10.1016/j.tsf.2009.07.161

Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units

Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Akinori Ebe, Masaharu Shiratani, Makoto Sekine, Masaru Hori, Eiji Ikenaga, Hiroki Kondo, Osamu Nakatsuka, Shigeaki Zaima

Electronic Devices

Research output: Contribution to journal › Article

21 Citations (Scopus)

Abstract

Plasma surface treatment of polymers has been carried out with argon/oxygen mixture plasmas driven by multiple low-inductance antenna units. Kinetic energy distribution of argon ions from the argon/oxygen mixture plasmas onto polymers showed considerable suppression of ion energies sufficiently less than 10 eV. Polyethyleneterephthalate (PET) films were exposed to argon/oxygen mixture plasma for 1-5 min on a water-cooled substrate holder. The etching depth of PET surface increased with increasing plasma-exposure time and the etching rate was 118 nm/min. Surface roughness of PET surface (root-mean-square value) increased from 0.5 nm to 2.7 nm with increasing plasma-exposure time from 0 min (original sample) to 5 min. Hard X-ray photoelectron spectroscopy (HXPES) was carried out for analysis of chemical bonding states of the PET surface. The HXPES analyses exhibited nano-surface modification of the PET surface without suffering degradation of molecular structures beneath.

Original language	English
Pages (from-to)	1006-1011
Number of pages	6
Journal	Thin Solid Films
Volume	518
Issue number	3
DOIs	https://doi.org/10.1016/j.tsf.2009.07.161
Publication status	Published - Dec 30 2009

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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Setsuhara, Y., Cho, K., Takenaka, K., Ebe, A., Shiratani, M., Sekine, M., Hori, M., Ikenaga, E., Kondo, H., Nakatsuka, O., & Zaima, S. (2009). Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units. Thin Solid Films, 518(3), 1006-1011. https://doi.org/10.1016/j.tsf.2009.07.161

Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units. / Setsuhara, Yuichi; Cho, Ken; Takenaka, Kosuke; Ebe, Akinori; Shiratani, Masaharu; Sekine, Makoto; Hori, Masaru; Ikenaga, Eiji; Kondo, Hiroki; Nakatsuka, Osamu; Zaima, Shigeaki.

In: Thin Solid Films, Vol. 518, No. 3, 30.12.2009, p. 1006-1011.

Research output: Contribution to journal › Article

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abstract = "Plasma surface treatment of polymers has been carried out with argon/oxygen mixture plasmas driven by multiple low-inductance antenna units. Kinetic energy distribution of argon ions from the argon/oxygen mixture plasmas onto polymers showed considerable suppression of ion energies sufficiently less than 10 eV. Polyethyleneterephthalate (PET) films were exposed to argon/oxygen mixture plasma for 1-5 min on a water-cooled substrate holder. The etching depth of PET surface increased with increasing plasma-exposure time and the etching rate was 118 nm/min. Surface roughness of PET surface (root-mean-square value) increased from 0.5 nm to 2.7 nm with increasing plasma-exposure time from 0 min (original sample) to 5 min. Hard X-ray photoelectron spectroscopy (HXPES) was carried out for analysis of chemical bonding states of the PET surface. The HXPES analyses exhibited nano-surface modification of the PET surface without suffering degradation of molecular structures beneath.",

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AU - Sekine, Makoto

AU - Hori, Masaru

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