Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units

Yuichi Setsuhara; Ken Cho; Kosuke Takenaka; Akinori Ebe; Masaharu Shiratani; Makoto Sekine; Masaru Hori; Eiji Ikenaga; Hiroki Kondo; Osamu Nakatsuka; Shigeaki Zaima

doi:10.1016/j.tsf.2009.07.161

Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units

Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Akinori Ebe, Masaharu Shiratani, Makoto Sekine, Masaru Hori, Eiji Ikenaga, Hiroki Kondo, Osamu Nakatsuka, Shigeaki Zaima

Electronic Devices

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21 Citations (Scopus)

Abstract

Plasma surface treatment of polymers has been carried out with argon/oxygen mixture plasmas driven by multiple low-inductance antenna units. Kinetic energy distribution of argon ions from the argon/oxygen mixture plasmas onto polymers showed considerable suppression of ion energies sufficiently less than 10 eV. Polyethyleneterephthalate (PET) films were exposed to argon/oxygen mixture plasma for 1-5 min on a water-cooled substrate holder. The etching depth of PET surface increased with increasing plasma-exposure time and the etching rate was 118 nm/min. Surface roughness of PET surface (root-mean-square value) increased from 0.5 nm to 2.7 nm with increasing plasma-exposure time from 0 min (original sample) to 5 min. Hard X-ray photoelectron spectroscopy (HXPES) was carried out for analysis of chemical bonding states of the PET surface. The HXPES analyses exhibited nano-surface modification of the PET surface without suffering degradation of molecular structures beneath.

Original language	English
Pages (from-to)	1006-1011
Number of pages	6
Journal	Thin Solid Films
Volume	518
Issue number	3
DOIs	https://doi.org/10.1016/j.tsf.2009.07.161
Publication status	Published - Dec 30 2009

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units. / Setsuhara, Yuichi; Cho, Ken; Takenaka, Kosuke; Ebe, Akinori; Shiratani, Masaharu; Sekine, Makoto; Hori, Masaru; Ikenaga, Eiji; Kondo, Hiroki; Nakatsuka, Osamu; Zaima, Shigeaki.

In: Thin Solid Films, Vol. 518, No. 3, 30.12.2009, p. 1006-1011.

Research output: Contribution to journal › Article › peer-review

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abstract = "Plasma surface treatment of polymers has been carried out with argon/oxygen mixture plasmas driven by multiple low-inductance antenna units. Kinetic energy distribution of argon ions from the argon/oxygen mixture plasmas onto polymers showed considerable suppression of ion energies sufficiently less than 10 eV. Polyethyleneterephthalate (PET) films were exposed to argon/oxygen mixture plasma for 1-5 min on a water-cooled substrate holder. The etching depth of PET surface increased with increasing plasma-exposure time and the etching rate was 118 nm/min. Surface roughness of PET surface (root-mean-square value) increased from 0.5 nm to 2.7 nm with increasing plasma-exposure time from 0 min (original sample) to 5 min. Hard X-ray photoelectron spectroscopy (HXPES) was carried out for analysis of chemical bonding states of the PET surface. The HXPES analyses exhibited nano-surface modification of the PET surface without suffering degradation of molecular structures beneath.",

author = "Yuichi Setsuhara and Ken Cho and Kosuke Takenaka and Akinori Ebe and Masaharu Shiratani and Makoto Sekine and Masaru Hori and Eiji Ikenaga and Hiroki Kondo and Osamu Nakatsuka and Shigeaki Zaima",

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AU - Setsuhara, Yuichi

AU - Cho, Ken

AU - Takenaka, Kosuke

AU - Ebe, Akinori

AU - Shiratani, Masaharu

AU - Sekine, Makoto

AU - Hori, Masaru

AU - Ikenaga, Eiji

AU - Kondo, Hiroki

AU - Nakatsuka, Osamu

AU - Zaima, Shigeaki

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Y1 - 2009/12/30

N2 - Plasma surface treatment of polymers has been carried out with argon/oxygen mixture plasmas driven by multiple low-inductance antenna units. Kinetic energy distribution of argon ions from the argon/oxygen mixture plasmas onto polymers showed considerable suppression of ion energies sufficiently less than 10 eV. Polyethyleneterephthalate (PET) films were exposed to argon/oxygen mixture plasma for 1-5 min on a water-cooled substrate holder. The etching depth of PET surface increased with increasing plasma-exposure time and the etching rate was 118 nm/min. Surface roughness of PET surface (root-mean-square value) increased from 0.5 nm to 2.7 nm with increasing plasma-exposure time from 0 min (original sample) to 5 min. Hard X-ray photoelectron spectroscopy (HXPES) was carried out for analysis of chemical bonding states of the PET surface. The HXPES analyses exhibited nano-surface modification of the PET surface without suffering degradation of molecular structures beneath.

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Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units

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