Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units

Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Akinori Ebe, Masaharu Shiratani, Makoto Sekine, Masaru Hori, Eiji Ikenaga, Hiroki Kondo, Osamu Nakatsuka, Shigeaki Zaima

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

Plasma surface treatment of polymers has been carried out with argon/oxygen mixture plasmas driven by multiple low-inductance antenna units. Kinetic energy distribution of argon ions from the argon/oxygen mixture plasmas onto polymers showed considerable suppression of ion energies sufficiently less than 10 eV. Polyethyleneterephthalate (PET) films were exposed to argon/oxygen mixture plasma for 1-5 min on a water-cooled substrate holder. The etching depth of PET surface increased with increasing plasma-exposure time and the etching rate was 118 nm/min. Surface roughness of PET surface (root-mean-square value) increased from 0.5 nm to 2.7 nm with increasing plasma-exposure time from 0 min (original sample) to 5 min. Hard X-ray photoelectron spectroscopy (HXPES) was carried out for analysis of chemical bonding states of the PET surface. The HXPES analyses exhibited nano-surface modification of the PET surface without suffering degradation of molecular structures beneath.

Original languageEnglish
Pages (from-to)1006-1011
Number of pages6
JournalThin Solid Films
Volume518
Issue number3
DOIs
Publication statusPublished - Dec 30 2009

Fingerprint

surface treatment
inductance
Inductance
Surface treatment
Polymers
antennas
Argon
Antennas
Plasmas
polymers
argon
Oxygen
Etching
oxygen
X ray photoelectron spectroscopy
etching
photoelectron spectroscopy
Ions
mean square values
holders

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units. / Setsuhara, Yuichi; Cho, Ken; Takenaka, Kosuke; Ebe, Akinori; Shiratani, Masaharu; Sekine, Makoto; Hori, Masaru; Ikenaga, Eiji; Kondo, Hiroki; Nakatsuka, Osamu; Zaima, Shigeaki.

In: Thin Solid Films, Vol. 518, No. 3, 30.12.2009, p. 1006-1011.

Research output: Contribution to journalArticle

Setsuhara, Y, Cho, K, Takenaka, K, Ebe, A, Shiratani, M, Sekine, M, Hori, M, Ikenaga, E, Kondo, H, Nakatsuka, O & Zaima, S 2009, 'Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units', Thin Solid Films, vol. 518, no. 3, pp. 1006-1011. https://doi.org/10.1016/j.tsf.2009.07.161
Setsuhara, Yuichi ; Cho, Ken ; Takenaka, Kosuke ; Ebe, Akinori ; Shiratani, Masaharu ; Sekine, Makoto ; Hori, Masaru ; Ikenaga, Eiji ; Kondo, Hiroki ; Nakatsuka, Osamu ; Zaima, Shigeaki. / Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units. In: Thin Solid Films. 2009 ; Vol. 518, No. 3. pp. 1006-1011.
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AU - Sekine, Makoto

AU - Hori, Masaru

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