Abstract
Plasma surface treatment of polymers has been carried out with argon/oxygen mixture plasmas driven by multiple low-inductance antenna units. Kinetic energy distribution of argon ions from the argon/oxygen mixture plasmas onto polymers showed considerable suppression of ion energies sufficiently less than 10 eV. Polyethyleneterephthalate (PET) films were exposed to argon/oxygen mixture plasma for 1-5 min on a water-cooled substrate holder. The etching depth of PET surface increased with increasing plasma-exposure time and the etching rate was 118 nm/min. Surface roughness of PET surface (root-mean-square value) increased from 0.5 nm to 2.7 nm with increasing plasma-exposure time from 0 min (original sample) to 5 min. Hard X-ray photoelectron spectroscopy (HXPES) was carried out for analysis of chemical bonding states of the PET surface. The HXPES analyses exhibited nano-surface modification of the PET surface without suffering degradation of molecular structures beneath.
| Original language | English |
|---|---|
| Pages (from-to) | 1006-1011 |
| Number of pages | 6 |
| Journal | Thin Solid Films |
| Volume | 518 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - Dec 30 2009 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry
Cite this
Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units. / Setsuhara, Yuichi; Cho, Ken; Takenaka, Kosuke; Ebe, Akinori; Shiratani, Masaharu; Sekine, Makoto; Hori, Masaru; Ikenaga, Eiji; Kondo, Hiroki; Nakatsuka, Osamu; Zaima, Shigeaki.
In: Thin Solid Films, Vol. 518, No. 3, 30.12.2009, p. 1006-1011.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units
AU - Setsuhara, Yuichi
AU - Cho, Ken
AU - Takenaka, Kosuke
AU - Ebe, Akinori
AU - Shiratani, Masaharu
AU - Sekine, Makoto
AU - Hori, Masaru
AU - Ikenaga, Eiji
AU - Kondo, Hiroki
AU - Nakatsuka, Osamu
AU - Zaima, Shigeaki
PY - 2009/12/30
Y1 - 2009/12/30
N2 - Plasma surface treatment of polymers has been carried out with argon/oxygen mixture plasmas driven by multiple low-inductance antenna units. Kinetic energy distribution of argon ions from the argon/oxygen mixture plasmas onto polymers showed considerable suppression of ion energies sufficiently less than 10 eV. Polyethyleneterephthalate (PET) films were exposed to argon/oxygen mixture plasma for 1-5 min on a water-cooled substrate holder. The etching depth of PET surface increased with increasing plasma-exposure time and the etching rate was 118 nm/min. Surface roughness of PET surface (root-mean-square value) increased from 0.5 nm to 2.7 nm with increasing plasma-exposure time from 0 min (original sample) to 5 min. Hard X-ray photoelectron spectroscopy (HXPES) was carried out for analysis of chemical bonding states of the PET surface. The HXPES analyses exhibited nano-surface modification of the PET surface without suffering degradation of molecular structures beneath.
AB - Plasma surface treatment of polymers has been carried out with argon/oxygen mixture plasmas driven by multiple low-inductance antenna units. Kinetic energy distribution of argon ions from the argon/oxygen mixture plasmas onto polymers showed considerable suppression of ion energies sufficiently less than 10 eV. Polyethyleneterephthalate (PET) films were exposed to argon/oxygen mixture plasma for 1-5 min on a water-cooled substrate holder. The etching depth of PET surface increased with increasing plasma-exposure time and the etching rate was 118 nm/min. Surface roughness of PET surface (root-mean-square value) increased from 0.5 nm to 2.7 nm with increasing plasma-exposure time from 0 min (original sample) to 5 min. Hard X-ray photoelectron spectroscopy (HXPES) was carried out for analysis of chemical bonding states of the PET surface. The HXPES analyses exhibited nano-surface modification of the PET surface without suffering degradation of molecular structures beneath.
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U2 - 10.1016/j.tsf.2009.07.161
DO - 10.1016/j.tsf.2009.07.161
M3 - Article
VL - 518
SP - 1006
EP - 1011
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
IS - 3
ER -