Polymerization in nanocrystalline diamond films by oxygen incorporation

Kungen Tsutsui, Tomohiro Ikeda

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Structure and resistivity of nanocrystalline diamond films deposited using microwave Ar-rich/O2/CH4 plasmas have been examined as a function of the O2/CH4 ratio from 0 to 0.53. Addition of O2 to Ar-rich/CH4 plasmas likely reduced the density of C2 radicals due to loss reactions of O atoms with CH4 and CHx radicals. The Raman peak of diamond at 1332 cm-1 was overlapped by the D peak of sp2-bonded, disordered carbon and its intensity was a little enhanced by the O2 addition, while the average size of sp2-bonded carbon clusters in nondiamond phases was increased. Oxygen was incorporated into the films in forms of C-O bonds, which bridged the carbon clusters themselves, and formed polymer-like, large-unit structures. The resistivity of the films was drastically increased from the order of 10-4 up to 104 Ω · m with a small O2 addition (1.2 vol.-% in total pressure), providing novel sensor and storage applications based on oxygen incorporation and desorption. A figure is presented. Decomposition of a Raman spectrum showing the diamond, D and G modes of amorphous carbon, and trans-polyacetylene peaks. The insert represents a typical SEM image showing a film surface.

Original languageEnglish
Pages (from-to)708-712
Number of pages5
JournalPlasma Processes and Polymers
Volume3
Issue number9
DOIs
Publication statusPublished - Nov 17 2006

Fingerprint

Diamond films
diamond films
Carbon clusters
Diamond
polymerization
Polymerization
Oxygen
carbon
Diamonds
oxygen
Polyacetylenes
Plasmas
Die casting inserts
diamonds
Amorphous carbon
electrical resistivity
Raman scattering
polyacetylene
Desorption
Polymers

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Polymers and Plastics

Cite this

Polymerization in nanocrystalline diamond films by oxygen incorporation. / Tsutsui, Kungen; Ikeda, Tomohiro.

In: Plasma Processes and Polymers, Vol. 3, No. 9, 17.11.2006, p. 708-712.

Research output: Contribution to journalArticle

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