Position-controlled growth of SiGe crystal grains on insulator by indentation-induced solid-phase crystallization (Special issue: Active-matrix flatpanel displays and devices: TFT technologies and FPD materials)

Kaoru Toko; Taizoh Sadoh; Masanobu Miyao

Position-controlled growth of SiGe crystal grains on insulator by indentation-induced solid-phase crystallization (Special issue: Active-matrix flatpanel displays and devices: TFT technologies and FPD materials)

Kaoru Toko, Taizoh Sadoh, Masanobu Miyao

Electronic Devices

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	03B007-1〜4
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	48
Issue number	3
Publication status	Published - Mar 2009

Access to Document

http://id.ndl.go.jp/bib/10191548

Cite this

Position-controlled growth of SiGe crystal grains on insulator by indentation-induced solid-phase crystallization (Special issue: Active-matrix flatpanel displays and devices: TFT technologies and FPD materials). / Toko, Kaoru; Sadoh, Taizoh; Miyao, Masanobu.
In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 48, No. 3, 03.2009, p. 03B007-1〜4.

Research output: Contribution to journal › Article › peer-review

Toko, K, Sadoh, T & Miyao, M 2009, 'Position-controlled growth of SiGe crystal grains on insulator by indentation-induced solid-phase crystallization (Special issue: Active-matrix flatpanel displays and devices: TFT technologies and FPD materials)', Japanese Journal of Applied Physics, Part 2: Letters, vol. 48, no. 3, pp. 03B007-1〜4. <http://id.ndl.go.jp/bib/10191548>

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title = "Position-controlled growth of SiGe crystal grains on insulator by indentation-induced solid-phase crystallization (Special issue: Active-matrix flatpanel displays and devices: TFT technologies and FPD materials)",

author = "Kaoru Toko and Taizoh Sadoh and Masanobu Miyao",

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T2 - Active-matrix flatpanel displays and devices: TFT technologies and FPD materials)

AU - Toko, Kaoru

AU - Sadoh, Taizoh

AU - Miyao, Masanobu

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JO - Japanese Journal of Applied Physics, Part 2: Letters

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