Possibility of high deposition rate in SmBa2Cu3O y, films prepared using the vapor-liquid-solid growth mode

Yusuke Ichino, Hisayoshi Matsuo, Yutaka Yoshida, Yoshiaki Tarai, Kaname Matsumoto, Masashi Mukaida, Ataru Ichinose, Shigeru Horii

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    10 Citations (Scopus)


    The vapor-liquid-solid (VLS) growth mode is expected to achieve high-quality REBa2Cu2Oy thin films at a high growth rate since it is almost identical to the liquid phase epitaxy (LPE) growth mode. We studied the effect of the deposition rate on superconductivity in SmBa2Cu3Oy (Sm123) thin films prepared using the VLS growth mode. The VLS-Sm123 films as well as that deposited by pulsed laser deposition (PLD) under optimal conditions had completely c-axis orientation and maintained high crystallinity. Critical temperatures were around 90 K and independent of the deposition rate. However, critical current densities increased with the deposition rate and reached over 1 MA/cm 2 at 77 K. In this study, a maximum deposition rate of 320nm/min was achieved; this was thirty times as high as that obtained by PLD. We propose that a deposition rate as high as that obtained by LPE can be achieved by the VLS growth mode.

    Original languageEnglish
    Pages (from-to)758-760
    Number of pages3
    JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    Issue number2 A
    Publication statusPublished - Feb 8 2006

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)


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