Potential structures are clarified experimentally with an emissive probe in silane-helium radio-frequency (rf) discharges containing particles. The results reveal, compared with a pure helium rf discharge, that both the crest and trough instantaneous plasma potentials in an rf oscillation shift toward the negative side, especially in the particle localized region near the plasma-sheath boundary. The absolute value of the self-bias potential of the powered electrode is reduced. A considerable electric field exists even in the bulk plasma region and the strength increases with the concentration ratio of silane to helium.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)