Potential structure in silane radio-frequency discharge containing particles

Yoshihiro Okuno, Hiroharu Fujita, Masaharu Shiratani, Yukio Watanabe

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Potential structures are clarified experimentally with an emissive probe in silane-helium radio-frequency (rf) discharges containing particles. The results reveal, compared with a pure helium rf discharge, that both the crest and trough instantaneous plasma potentials in an rf oscillation shift toward the negative side, especially in the particle localized region near the plasma-sheath boundary. The absolute value of the self-bias potential of the powered electrode is reduced. A considerable electric field exists even in the bulk plasma region and the strength increases with the concentration ratio of silane to helium.

Original languageEnglish
Pages (from-to)1748-1750
Number of pages3
JournalApplied Physics Letters
Volume63
Issue number13
DOIs
Publication statusPublished - Dec 1 1993

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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