Precise and nondestructive characterization of a 'buried' nanostructure in a polymer thin film using synchrotron radiation ultra-small angle X-ray scattering

Takamichi Shinohara, Tomoko Shirahase, Daiki Murakami, Taiki Hoshino, Moriya Kikuchi, Jun Ichiro Koike, Misao Horigome, Hiroyasu Masunaga, Hiroki Ogawa, Atsushi Takahara

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

Nanoimprint lithography (NIL) is a simple and high-resolution patterning method. Nanoimprinted structures can be fabricated not only as surface structures but also as 'buried' structures for applications such as electro-optical devices. However, a precise and nondestructive evaluation method for nanoimprinted structures has not yet been established. Synchrotron radiation ultra-small angle X-ray scattering (SR-USAXS) is a nondestructive and high-resolution characterization method. In this study, we fabricated nanostructures on a poly(lactic acid) (PLA) film using NIL. In addition, the nanoimprinted PLA film was covered with a polystyrene thin film to fabricate a 'buried' structure. The fabricated surface and the 'buried' structure were evaluated using SR-USAXS. The scattering pattern was clearly obtained from the surface and the 'buried' structure. The size of the 'buried' structure, which was estimated from the diffraction pattern, was in good agreement with that of the surface structure. These results indicate that SR-USAXS is powerful tool for the nondestructive and precise characterization of surface and 'buried' structures.

Original languageEnglish
Pages (from-to)307-312
Number of pages6
JournalPolymer Journal
Volume45
Issue number3
DOIs
Publication statusPublished - Mar 2013

All Science Journal Classification (ASJC) codes

  • Polymers and Plastics
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Precise and nondestructive characterization of a 'buried' nanostructure in a polymer thin film using synchrotron radiation ultra-small angle X-ray scattering'. Together they form a unique fingerprint.

Cite this