TY - JOUR
T1 - Predicting the amount of carbon in carbon nanotubes grown by CH 4 rf plasmas
AU - Okita, Atsushi
AU - Suda, Yoshiyuki
AU - Ozeki, Atsushi
AU - Sugawara, Hirotake
AU - Sakai, Yosuke
AU - Oda, Akinori
AU - Nakamura, Junji
N1 - Funding Information:
Work by A. Okita was supported under a 21st century COE program, “Meme-Media Technology Approach to the R&D of Next-Generation Information Technologies” and a Grant-in-Aid (16760240) by MEXT and The Ushio Foundation, Japan. The authors acknowledge provision of the experimental facility by Professors T. Fukui and K. Sueoka at Hokkaido University and Dr. J. Tsujino at Hokkaido Electric and Power Corporation, and valuable discussions on PECVD experiments and plasma modeling with Professor Z. F. Ren at Boston College and Dr. D. Hash at NASA.
PY - 2006
Y1 - 2006
N2 - Carbon nanotubes (CNTs) were grown on Si substrates by rf C H4 plasma-enhanced chemical vapor deposition in a pressure range of 1-10 Torr, and then characterized by scanning electron microscopy. At 1 Torr, the CNTs continued growing up to 60 min, while their height at 4 Torr had leveled off at 20 min. CNTs hardly grew at 10 Torr and amorphous carbon was deposited instead. C H4 plasma was simulated using a one-dimensional fluid model to evaluate the production and transport of radicals, ions, and nonradical neutrals. The amount of simulated carbon supplied to the electrode surface via the flux of radicals and ions such as C H3, C2 H5, and C2 H5+ was consistent with estimations from experimental results.
AB - Carbon nanotubes (CNTs) were grown on Si substrates by rf C H4 plasma-enhanced chemical vapor deposition in a pressure range of 1-10 Torr, and then characterized by scanning electron microscopy. At 1 Torr, the CNTs continued growing up to 60 min, while their height at 4 Torr had leveled off at 20 min. CNTs hardly grew at 10 Torr and amorphous carbon was deposited instead. C H4 plasma was simulated using a one-dimensional fluid model to evaluate the production and transport of radicals, ions, and nonradical neutrals. The amount of simulated carbon supplied to the electrode surface via the flux of radicals and ions such as C H3, C2 H5, and C2 H5+ was consistent with estimations from experimental results.
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U2 - 10.1063/1.2150599
DO - 10.1063/1.2150599
M3 - Article
AN - SCOPUS:30844435277
SN - 0021-8979
VL - 99
JO - Journal of Applied Physics
JF - Journal of Applied Physics
IS - 1
M1 - 014302
ER -