Abstract
Dispersion relations of refractive indexes and extinction coefficients of constituent materials were obtained by comparing the experimental and simulated transmission spectra of single-layer Er2O3 and TiO2 films. We designed multilayer thin films of [Er2O3/TiO2]6/[Er2 O3]2/[TiO2/Er2O3]6 such that they can act as photonic crystals exhibiting a resonance wavelength of 514 nm. We prepared single-layer TiO2 and Er2O3 thin films on quartz glass substrates by employing a magnetron sputtering deposition method. Uniform films exhibiting very high transmittance values were obtained. Deposition rates of the TiO2 and Er2O3 films were 0.44 and 0.82 nm/s, respectively. [Er2O3/TiO2]6/[Er2 O3]2/[TiO2/Er2O3]6 multilayer films, to be used for optical bandpass filter applications, were also prepared using a multitarget sputtering deposition method. Uniform and transparent films were obtained; however, the wavelength corresponding to the highest transmittance was observed around 490 nm through ultraviolet-visible near-infrared spectroscopic measurements. The shift in the wavelength can be attributed to the low crystallinity and variations in the thicknesses of Er2O3 and TiO2 films.
Original language | English |
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Article number | 7490413 |
Pages (from-to) | 3066-3070 |
Number of pages | 5 |
Journal | IEEE Transactions on Plasma Science |
Volume | 44 |
Issue number | 12 |
DOIs | |
Publication status | Published - Dec 2016 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Nuclear and High Energy Physics
- Condensed Matter Physics