Preparation of functional thin films with elemental gradient by sputtering with mixed powder targets

Hiroharu Kawasaki, Tamiko Ohshima, Yoshihito Yagyu, Takeshi Ihara, Kazuhiko Mitsuhashi, Hiroshi Nishiguchi, Yoshiaki Suda

Research output: Contribution to journalArticlepeer-review

Abstract

Functional thin films with a compositional gradient were deposited by a sputtering method with mixed powder targets. The composition ratio of nickel (Ni) and stainless steel (SUS304) was varied over the film thickness using several types of nickel oxide and stainless steel mixed powder targets. Our results indicate that mixed nickel-doped stainless-steel thin films were successfully prepared on both stainless-steel and Si substrates and the mixing ratio was controlled by the composition of the nickel oxide and stainless steel mixed powder.

Original languageEnglish
Article numberSA1019
JournalJapanese journal of applied physics
Volume61
Issue numberSA
DOIs
Publication statusPublished - Jan 2022
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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