Thin films of In2O3 were fabricated on an alumina substrate by spin-coating of an aqueous solution prepared from In(OH)3, acetic acid and ammonium carboxymethyl cellulose, followed by drying at 110°C and calcining at 600°C. As observed by SEM, the films consisted of a dense stack of tiny In2O3 particles (23-27 nm in diameter) and covered large grains of the alumina substrate well. Subsequently, film thickness was well controlled by the number of spin-coatings. Gas sensing properties were strongly dependent on the film thickness and temperature and fairly excellent sensing performances to H2, CO and C3H8 were obtained with a 160 nm-thick film (5 times coated) at 350°C.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry