Preparation of indium oxide thin film by spin-coating method and its gas-sensing properties

Wan Young Chung, Go Sakai, Kengo Shimanoe, Norio Miura, Duk Dong Lee, Noboru Yamazoe

Research output: Contribution to journalArticlepeer-review

119 Citations (Scopus)

Abstract

Thin films of In2O3 were fabricated on an alumina substrate by spin-coating of an aqueous solution prepared from In(OH)3, acetic acid and ammonium carboxymethyl cellulose, followed by drying at 110°C and calcining at 600°C. As observed by SEM, the films consisted of a dense stack of tiny In2O3 particles (23-27 nm in diameter) and covered large grains of the alumina substrate well. Subsequently, film thickness was well controlled by the number of spin-coatings. Gas sensing properties were strongly dependent on the film thickness and temperature and fairly excellent sensing performances to H2, CO and C3H8 were obtained with a 160 nm-thick film (5 times coated) at 350°C.

Original languageEnglish
Pages (from-to)139-145
Number of pages7
JournalSensors and Actuators, B: Chemical
Volume46
Issue number2-3
DOIs
Publication statusPublished - Feb 15 1998

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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