Preparation of indium oxide thin film by spin-coating method and its gas-sensing properties

Wan Young Chung; Go Sakai; Kengo Shimanoe; Norio Miura; Duk Dong Lee; Noboru Yamazoe

doi:10.1016/S0925-4005(98)00100-2

Preparation of indium oxide thin film by spin-coating method and its gas-sensing properties

Wan Young Chung, Go Sakai, Kengo Shimanoe, Norio Miura, Duk Dong Lee, Noboru Yamazoe

Functional Materials Science

Research output: Contribution to journal › Article › peer-review

131 Citations (Scopus)

Abstract

Thin films of In₂O₃ were fabricated on an alumina substrate by spin-coating of an aqueous solution prepared from In(OH)₃, acetic acid and ammonium carboxymethyl cellulose, followed by drying at 110°C and calcining at 600°C. As observed by SEM, the films consisted of a dense stack of tiny In₂O₃ particles (23-27 nm in diameter) and covered large grains of the alumina substrate well. Subsequently, film thickness was well controlled by the number of spin-coatings. Gas sensing properties were strongly dependent on the film thickness and temperature and fairly excellent sensing performances to H₂, CO and C₃H₈ were obtained with a 160 nm-thick film (5 times coated) at 350°C.

Original language	English
Pages (from-to)	139-145
Number of pages	7
Journal	Sensors and Actuators, B: Chemical
Volume	46
Issue number	2-3
DOIs	https://doi.org/10.1016/S0925-4005(98)00100-2
Publication status	Published - Feb 15 1998

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/S0925-4005(98)00100-2

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@article{03fb029f50ed4e85873fa6d0c90b55aa,

title = "Preparation of indium oxide thin film by spin-coating method and its gas-sensing properties",

abstract = "Thin films of In2O3 were fabricated on an alumina substrate by spin-coating of an aqueous solution prepared from In(OH)3, acetic acid and ammonium carboxymethyl cellulose, followed by drying at 110°C and calcining at 600°C. As observed by SEM, the films consisted of a dense stack of tiny In2O3 particles (23-27 nm in diameter) and covered large grains of the alumina substrate well. Subsequently, film thickness was well controlled by the number of spin-coatings. Gas sensing properties were strongly dependent on the film thickness and temperature and fairly excellent sensing performances to H2, CO and C3H8 were obtained with a 160 nm-thick film (5 times coated) at 350°C.",

author = "Chung, {Wan Young} and Go Sakai and Kengo Shimanoe and Norio Miura and Lee, {Duk Dong} and Noboru Yamazoe",

year = "1998",

month = feb,

day = "15",

doi = "10.1016/S0925-4005(98)00100-2",

language = "English",

volume = "46",

pages = "139--145",

journal = "Sensors and Actuators B: Chemical",

issn = "0925-4005",

publisher = "Elsevier",

number = "2-3",

}

TY - JOUR

T1 - Preparation of indium oxide thin film by spin-coating method and its gas-sensing properties

AU - Chung, Wan Young

AU - Sakai, Go

AU - Shimanoe, Kengo

AU - Miura, Norio

AU - Lee, Duk Dong

AU - Yamazoe, Noboru

PY - 1998/2/15

Y1 - 1998/2/15

N2 - Thin films of In2O3 were fabricated on an alumina substrate by spin-coating of an aqueous solution prepared from In(OH)3, acetic acid and ammonium carboxymethyl cellulose, followed by drying at 110°C and calcining at 600°C. As observed by SEM, the films consisted of a dense stack of tiny In2O3 particles (23-27 nm in diameter) and covered large grains of the alumina substrate well. Subsequently, film thickness was well controlled by the number of spin-coatings. Gas sensing properties were strongly dependent on the film thickness and temperature and fairly excellent sensing performances to H2, CO and C3H8 were obtained with a 160 nm-thick film (5 times coated) at 350°C.

AB - Thin films of In2O3 were fabricated on an alumina substrate by spin-coating of an aqueous solution prepared from In(OH)3, acetic acid and ammonium carboxymethyl cellulose, followed by drying at 110°C and calcining at 600°C. As observed by SEM, the films consisted of a dense stack of tiny In2O3 particles (23-27 nm in diameter) and covered large grains of the alumina substrate well. Subsequently, film thickness was well controlled by the number of spin-coatings. Gas sensing properties were strongly dependent on the film thickness and temperature and fairly excellent sensing performances to H2, CO and C3H8 were obtained with a 160 nm-thick film (5 times coated) at 350°C.

UR - http://www.scopus.com/inward/record.url?scp=0345914958&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0345914958&partnerID=8YFLogxK

U2 - 10.1016/S0925-4005(98)00100-2

DO - 10.1016/S0925-4005(98)00100-2

M3 - Article

AN - SCOPUS:0345914958

SN - 0925-4005

VL - 46

SP - 139

EP - 145

JO - Sensors and Actuators B: Chemical

JF - Sensors and Actuators B: Chemical

IS - 2-3

ER -

Preparation of indium oxide thin film by spin-coating method and its gas-sensing properties

Abstract

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