Preparation of PbZrxTi1-xO3 thin films by KrF excimer laser ablation technique

Hiromitsu Kurogi, Yukihiko Yamagata, Tomoaki Ikegami, Kenji Ebihara, Yin Tong Bok

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A pulsed KrF excimer laser was used to ablate PZT thin films. The composition, crystallization, and ferroelectric properties of the PZT thin films prepared under various conditions were investigated. X ray diffraction (XRD) patterns showed that the PZT thin films prepared on MgO(100) substrates had a perovskite - pyrochlore mixed structure. The condition of 100 mTorr oxygen pressure provides high quality perovskite films. It was also found that the stoichiometric condition of the deposited films was obtained in ambient oxygen of 100 to approximately 400 mTorr. The ferroelectric properties of the Pt/PZT/Pt/MgO structure were also studied. The capacitance-voltage characteristics and the corresponding hysteresis loop of the dielectric-electric field curve are discussed.

Original languageEnglish
Pages (from-to)237-242
Number of pages6
JournalUnknown Journal
Volume433
Publication statusPublished - 1996
Externally publishedYes

Fingerprint

Excimer lasers
Laser ablation
ablation
laser
Thin films
Perovskite
Ferroelectric materials
Oxygen
perovskite
Hysteresis loops
Crystallization
Pulsed lasers
Diffraction patterns
pyrochlore
Capacitance
oxygen
Electric fields
X ray diffraction
hysteresis
Electric potential

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

Cite this

Kurogi, H., Yamagata, Y., Ikegami, T., Ebihara, K., & Bok, Y. T. (1996). Preparation of PbZrxTi1-xO3 thin films by KrF excimer laser ablation technique. Unknown Journal, 433, 237-242.

Preparation of PbZrxTi1-xO3 thin films by KrF excimer laser ablation technique. / Kurogi, Hiromitsu; Yamagata, Yukihiko; Ikegami, Tomoaki; Ebihara, Kenji; Bok, Yin Tong.

In: Unknown Journal, Vol. 433, 1996, p. 237-242.

Research output: Contribution to journalArticle

Kurogi, H, Yamagata, Y, Ikegami, T, Ebihara, K & Bok, YT 1996, 'Preparation of PbZrxTi1-xO3 thin films by KrF excimer laser ablation technique', Unknown Journal, vol. 433, pp. 237-242.
Kurogi, Hiromitsu ; Yamagata, Yukihiko ; Ikegami, Tomoaki ; Ebihara, Kenji ; Bok, Yin Tong. / Preparation of PbZrxTi1-xO3 thin films by KrF excimer laser ablation technique. In: Unknown Journal. 1996 ; Vol. 433. pp. 237-242.
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