Preparation of PZT/YBCO/YAlO heterostructure thin films by KrF excimer laser ablation

Kenji Ebihara; Hiromitsu Kurogi; Yukihiko Yamagata; Tomoaki Ikegami; Alexander M. Grishin

Preparation of PZT/YBCO/YAlO heterostructure thin films by KrF excimer laser ablation

Kenji Ebihara, Hiromitsu Kurogi, Yukihiko Yamagata, Tomoaki Ikegami, Alexander M. Grishin

Research output: Contribution to journal › Conference article › peer-review

Abstract

The perovskite oxide YBa₂Cu₃O_7-X (YBCO) and Pb(Zr_XTi_1-X)O₃ (PZT) thin films have been deposited for superconducting-ferroelectric devices. KrF excimer laser ablation technique was used at the deposition conditions of 200-600 m Torr O₂, 2-3 J/cm² and 5-10 Hz operation frequency. Heterostructures of PZT-YBCO-YAlO₃:Nd show the zero resistivity critical temperature of 82 K and excellent ferroelectric properties of remnant polarization 32 μC/cm², coercive force of 80 kV/cm and dielectric constant 800. Cycling fatigue characteristics and leakage current are also discussed.

Original language	English
Pages (from-to)	193-198
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	526
Publication status	Published - Dec 1 1998
Externally published	Yes
Event	Proceedings of the 1998 MRS Spring Meeting - San Francisco, CA, USA Duration: Apr 13 1998 → Apr 16 1998

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

@article{926520872c3d4408bc757b95a9418ed8,

title = "Preparation of PZT/YBCO/YAlO heterostructure thin films by KrF excimer laser ablation",

abstract = "The perovskite oxide YBa2Cu3O7-X (YBCO) and Pb(ZrXTi1-X)O3 (PZT) thin films have been deposited for superconducting-ferroelectric devices. KrF excimer laser ablation technique was used at the deposition conditions of 200-600 m Torr O2, 2-3 J/cm2 and 5-10 Hz operation frequency. Heterostructures of PZT-YBCO-YAlO3:Nd show the zero resistivity critical temperature of 82 K and excellent ferroelectric properties of remnant polarization 32 μC/cm2, coercive force of 80 kV/cm and dielectric constant 800. Cycling fatigue characteristics and leakage current are also discussed.",

author = "Kenji Ebihara and Hiromitsu Kurogi and Yukihiko Yamagata and Tomoaki Ikegami and Grishin, {Alexander M.}",

year = "1998",

month = dec,

day = "1",

language = "English",

volume = "526",

pages = "193--198",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1998 MRS Spring Meeting ; Conference date: 13-04-1998 Through 16-04-1998",

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TY - JOUR

T1 - Preparation of PZT/YBCO/YAlO heterostructure thin films by KrF excimer laser ablation

AU - Ebihara, Kenji

AU - Kurogi, Hiromitsu

AU - Yamagata, Yukihiko

AU - Ikegami, Tomoaki

AU - Grishin, Alexander M.

PY - 1998/12/1

Y1 - 1998/12/1

N2 - The perovskite oxide YBa2Cu3O7-X (YBCO) and Pb(ZrXTi1-X)O3 (PZT) thin films have been deposited for superconducting-ferroelectric devices. KrF excimer laser ablation technique was used at the deposition conditions of 200-600 m Torr O2, 2-3 J/cm2 and 5-10 Hz operation frequency. Heterostructures of PZT-YBCO-YAlO3:Nd show the zero resistivity critical temperature of 82 K and excellent ferroelectric properties of remnant polarization 32 μC/cm2, coercive force of 80 kV/cm and dielectric constant 800. Cycling fatigue characteristics and leakage current are also discussed.

AB - The perovskite oxide YBa2Cu3O7-X (YBCO) and Pb(ZrXTi1-X)O3 (PZT) thin films have been deposited for superconducting-ferroelectric devices. KrF excimer laser ablation technique was used at the deposition conditions of 200-600 m Torr O2, 2-3 J/cm2 and 5-10 Hz operation frequency. Heterostructures of PZT-YBCO-YAlO3:Nd show the zero resistivity critical temperature of 82 K and excellent ferroelectric properties of remnant polarization 32 μC/cm2, coercive force of 80 kV/cm and dielectric constant 800. Cycling fatigue characteristics and leakage current are also discussed.

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M3 - Conference article

AN - SCOPUS:0032317748

SN - 0272-9172

VL - 526

SP - 193

EP - 198

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1998 MRS Spring Meeting

Y2 - 13 April 1998 through 16 April 1998

ER -

Preparation of PZT/YBCO/YAlO heterostructure thin films by KrF excimer laser ablation

Abstract

All Science Journal Classification (ASJC) codes

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