Preparation of SrBi2Ta2O9 thin films by metalorganic chemical vapor deposition from two new liquid organometallic sources

Hiroshi Funakubo, Norimasa Nukaga, Katsuyuki Ishikawa, Takayuki Watanabe

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

SrBi2Ta2O9 thin films were prepared with high compositional reproducibility by metalorganic chemical vapor deposition (MOCVD) using Bi(CH3)3, Sr[Ta(O·C2H5)6]2 and O2 as source materials. When the deposition temperature was increased, the Bi/Ta and Sr/Ta ratios in the film increased and decreased, respectively. This behavior can be estimated from the deposition temperature dependence of Bi2O3 and Sr-Ta-O films deposited from Bi(CH3)3-O2 and Sr[Ta(O·C2H5)6]2-O2 systems, respectively. Bi/Ta ratio can be controlled by the input gas concentration ratio of Bi(CH3)3 to Sr[Ta(O·C2H5)6]2 at 600 °C. On the other hand, Sr/Ta ratio was independent of the input gas concentration. An almost single phase of SrBi2Ta2O9 was deposited at 670 °C. The remanent polarization and the coercive field of the film deposited at 670 °C following heat treatment at 750 °C for 30 min in O2 atmosphere were 5.0 μC/cm2 and 80 kV/cm, respectively.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume38
Issue number2 B
DOIs
Publication statusPublished - Jan 1 1999

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Metallorganic chemical vapor deposition
Organometallics
metalorganic chemical vapor deposition
Thin films
preparation
Liquids
liquids
thin films
Remanence
Gases
gases
heat treatment
Heat treatment
atmospheres
Temperature
temperature dependence
polarization
temperature

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

Preparation of SrBi2Ta2O9 thin films by metalorganic chemical vapor deposition from two new liquid organometallic sources. / Funakubo, Hiroshi; Nukaga, Norimasa; Ishikawa, Katsuyuki; Watanabe, Takayuki.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 38, No. 2 B, 01.01.1999.

Research output: Contribution to journalArticle

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