Preparation of TiO2/SiOx double-layer films on glass beads and its application to NO and SO2 removal

Hung Cuong Pham, Kyo Seon Kim

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Glass beads were coated with SiOx thin film as the first layer and with TiO2 thin film as the second layer by a rotating cylindrical PCVD reactor. The thicknesses of TiO2/SiOx double-layer films were measured by scanning electron microscopy. Glass beads coated with TiO2/SiOx double-layer films were packed inside the cylindrical reactor. NO and SO2 removal by dielectric barrier dischargephotocatalyst (DBD-P) hybrid process was tested for various conditions of process variables. The NO and SO2 removal efficiencies were improved by using a combination of dielectric barrier discharge and photodegradation by TiO2/SiOx double-layer films. The stronger the applied voltage is, the higher the pulse frequency is, or the longer the gas residence time is, the higher the NO and SO2 removal efficiencies become. In this study, we found that the glass beads coated with TiO2/SiOx double-layer films by a rotating cylindrical PCVD reactor could be used effectively to remove NO and SO2 by DBD-P hybrid process.

Original languageEnglish
Pages (from-to)5568-5571
Number of pages4
JournalJournal of nanoscience and nanotechnology
Volume13
Issue number8
DOIs
Publication statusPublished - Aug 2013
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

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