Preparation of tris(8-hydroxyquinolinato)aluminum thin films by sputtering deposition using powder and pressed powder targets

Hiroharu Kawasaki, Tamiko Ohshima, Yoshihito Yagyu, Takeshi Ihara, Rei Tanaka, Yoshiaki Suda

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Tris(8-hydroxyquinolinato)aluminum (Alq3) thin films, for use in organic electroluminescence displays, were prepared by a sputtering deposition method using powder and pressed powder targets. Experimental results suggest that Alq3 thin films can be prepared using powder and pressed powder targets, although the films were amorphous. The surface color of the target after deposition became dark brown, and the Fourier transform infrared spectroscopy spectrum changed when using a pressed powder target. The deposition rate of the film using a powder target was higher than that using a pressed powder target. That may be because the electron and ion densities of the plasma generated using the powder target are higher than those when using pressed powder targets under the same deposition conditions. The properties of a thin film prepared using a powder target were almost the same as those of a film prepared using a pressed powder target.

Original languageEnglish
Article number06HE01
JournalJapanese journal of applied physics
Volume56
Issue number6
DOIs
Publication statusPublished - Jun 2017
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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