Production Mechanism of a Large-Diameter Uniform Electron Cyclotron Resonance Plasma Generated by a Circular T E 01 Mode Microwave

Nobuyoshi Hirotsu, Toru Yamaguchi, Ryota Hidaka, Masayoshi Tanaka, Yoshinobu Kawai

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    12 Citations (Scopus)

    Abstract

    To clarify the production mechanism of a large-diameter uniform electron cyclotron resonance (ECR) plasma generated by a circular TE01 mode microwave experimentally, the wave propagation characteristic in the plasma is measured with an interferometer. It is shown that a microwave introduced into the chamber is transformed mainly into an electron cyclotron wave and then entirely absorbed around the resonance point. Furthermore, it is experimentally proven that the correspondence between the radial distribution of the electric field intensity of injected microwaves and that of waves propagating in plasma may depend on the magnetic field intensity around the injection point. It is also confirmed that it is necessary to optimize the magnetic field configuration to generate a uniform ECR plasma since the absorption region of microwaves is as wide as from ω/ω c e ∼0.65 to adjacent to the resonance point.

    Original languageEnglish
    Pages (from-to)2712
    Number of pages1
    JournalJapanese journal of applied physics
    Volume33
    Issue number5R
    DOIs
    Publication statusPublished - May 1994

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

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