Abstract
An electron cyclotron resonance (ECR) plasma with a low electron temperature (< 2eV) and high electron density (∼ 1012 cm-3) was realized in a mirror magnetic field for Ar/N2 or N2 gas. It was found based on the particle and power balance that the decrease in the electron temperature was due to the magnetic-mirror confinement depending on the collision cross section between electrons and neutral particles. The experimental and numerical results suggest that diluting with N2 gas, whose excitation cross section peaks at a low electron energy of about 2 eV, in the mirror magnetic field enables us to reduce the electron temperature efficiently in an ECR plasma.
| Original language | English |
|---|---|
| Pages (from-to) | 2489-2494 |
| Number of pages | 6 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 40 |
| Issue number | 4 A |
| Publication status | Published - Apr 1 2001 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)
Cite this
Itagaki, N., Ueda, Y., Ishii, N., & Kawai, Y. (2001). Production of low-electron-temperature electron cyclotron resonance plasma using nitrogen gas in the mirror magnetic field. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 40(4 A), 2489-2494.