Production of low-electron-temperature electron cyclotron resonance plasma using nitrogen gas in the mirror magnetic field

Naho Itagaki; Yoko Ueda; Nobuo Ishii; Yoshinobu Kawai

doi:10.1143/jjap.40.2489

Production of low-electron-temperature electron cyclotron resonance plasma using nitrogen gas in the mirror magnetic field

Naho Itagaki, Yoko Ueda, Nobuo Ishii, Yoshinobu Kawai

Department of I&E Visionaries

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

An electron cyclotron resonance (ECR) plasma with a low electron temperature (< 2eV) and high electron density (∼ 10₁₂ cm^-3) was realized in a mirror magnetic field for Ar/N₂ or N₂ gas. It was found based on the particle and power balance that the decrease in the electron temperature was due to the magnetic-mirror confinement depending on the collision cross section between electrons and neutral particles. The experimental and numerical results suggest that diluting with N₂ gas, whose excitation cross section peaks at a low electron energy of about 2 eV, in the mirror magnetic field enables us to reduce the electron temperature efficiently in an ECR plasma.

Original language	English
Pages (from-to)	2489-2494
Number of pages	6
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	40
Issue number	4 A
DOIs	https://doi.org/10.1143/jjap.40.2489
Publication status	Published - Apr 2001

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.40.2489

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Production of low-electron-temperature electron cyclotron resonance plasma using nitrogen gas in the mirror magnetic field. / Itagaki, Naho; Ueda, Yoko; Ishii, Nobuo; Kawai, Yoshinobu.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 40, No. 4 A, 04.2001, p. 2489-2494.

Research output: Contribution to journal › Article › peer-review

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abstract = "An electron cyclotron resonance (ECR) plasma with a low electron temperature (< 2eV) and high electron density (∼ 1012 cm-3) was realized in a mirror magnetic field for Ar/N2 or N2 gas. It was found based on the particle and power balance that the decrease in the electron temperature was due to the magnetic-mirror confinement depending on the collision cross section between electrons and neutral particles. The experimental and numerical results suggest that diluting with N2 gas, whose excitation cross section peaks at a low electron energy of about 2 eV, in the mirror magnetic field enables us to reduce the electron temperature efficiently in an ECR plasma.",

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AB - An electron cyclotron resonance (ECR) plasma with a low electron temperature (< 2eV) and high electron density (∼ 1012 cm-3) was realized in a mirror magnetic field for Ar/N2 or N2 gas. It was found based on the particle and power balance that the decrease in the electron temperature was due to the magnetic-mirror confinement depending on the collision cross section between electrons and neutral particles. The experimental and numerical results suggest that diluting with N2 gas, whose excitation cross section peaks at a low electron energy of about 2 eV, in the mirror magnetic field enables us to reduce the electron temperature efficiently in an ECR plasma.

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