An electron cyclotron resonance (ECR) plasma with a low electron temperature (< 2eV) and high electron density (∼ 1012 cm-3) was realized in a mirror magnetic field for Ar/N2 or N2 gas. It was found based on the particle and power balance that the decrease in the electron temperature was due to the magnetic-mirror confinement depending on the collision cross section between electrons and neutral particles. The experimental and numerical results suggest that diluting with N2 gas, whose excitation cross section peaks at a low electron energy of about 2 eV, in the mirror magnetic field enables us to reduce the electron temperature efficiently in an ECR plasma.
|Number of pages||6|
|Journal||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|Issue number||4 A|
|Publication status||Published - Apr 1 2001|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)