Abstract
An electron cyclotron resonance (ECR) plasma with a low electron temperature (< 2eV) and high electron density (∼ 1012 cm-3) was realized in a mirror magnetic field for Ar/N2 or N2 gas. It was found based on the particle and power balance that the decrease in the electron temperature was due to the magnetic-mirror confinement depending on the collision cross section between electrons and neutral particles. The experimental and numerical results suggest that diluting with N2 gas, whose excitation cross section peaks at a low electron energy of about 2 eV, in the mirror magnetic field enables us to reduce the electron temperature efficiently in an ECR plasma.
Original language | English |
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Pages (from-to) | 2489-2494 |
Number of pages | 6 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 40 |
Issue number | 4 A |
DOIs | |
Publication status | Published - Apr 2001 |
All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)